10/20/2011	8:29:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	8:29:46 AM	Recipe started at 8:29 AM
10/20/2011	8:29:46 AM	Helium valve closed
10/20/2011	8:29:46 AM	H2 valve closed
10/20/2011	8:29:46 AM	BCl3 valve closed
10/20/2011	8:29:46 AM	PH3 valve closed
10/20/2011	8:29:46 AM	SiCl4 pre valve closed
10/20/2011	8:29:46 AM	SiCl4 post valve closed
10/20/2011	8:29:46 AM	Main Vac valve closed
10/20/2011	8:29:46 AM	Bypass valve closed
10/20/2011	8:29:46 AM	Bubbler valve closed
10/20/2011	8:29:46 AM	Helium MFC set to  0.000000
10/20/2011	8:29:46 AM	H2 MFC set to  0.000000
10/20/2011	8:29:46 AM	BCl3 MFC set to  0.000000
10/20/2011	8:29:46 AM	PHl3 MFC set to  0.000000
10/20/2011	8:29:46 AM	SiCl4 MFC set to  0.000000
10/20/2011	8:29:46 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	8:29:46 AM	Tube furnace set to 0
10/20/2011	8:29:49 AM	H2 valve closed
10/20/2011	8:29:49 AM	BCl3 valve closed
10/20/2011	8:29:49 AM	PH3 valve closed
10/20/2011	8:29:49 AM	SiCl4 pre valve closed
10/20/2011	8:29:49 AM	SiCl4 post valve closed
10/20/2011	8:29:49 AM	Main Vac valve closed
10/20/2011	8:29:49 AM	Bypass valve closed
10/20/2011	8:29:49 AM	Bubbler valve closed
10/20/2011	8:29:49 AM	Helium valve opened
10/20/2011	8:29:49 AM	Helium MFC set to  500.000000
10/20/2011	8:29:49 AM	H2 MFC set to  0.000000
10/20/2011	8:29:49 AM	BCl3 MFC set to  0.000000
10/20/2011	8:29:49 AM	PHl3 MFC set to  0.000000
10/20/2011	8:29:49 AM	SiCl4 MFC set to  0.000000
10/20/2011	8:29:49 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	8:29:49 AM	Tube furnace set to 0
10/20/2011	8:30:55 AM	Helium valve closed
10/20/2011	8:30:55 AM	H2 valve closed
10/20/2011	8:30:55 AM	BCl3 valve closed
10/20/2011	8:30:55 AM	PH3 valve closed
10/20/2011	8:30:55 AM	SiCl4 pre valve closed
10/20/2011	8:30:55 AM	SiCl4 post valve closed
10/20/2011	8:30:55 AM	Main Vac valve closed
10/20/2011	8:30:55 AM	Bypass valve closed
10/20/2011	8:30:55 AM	Bubbler valve closed
10/20/2011	8:30:55 AM	Helium MFC set to  0.000000
10/20/2011	8:30:55 AM	H2 MFC set to  0.000000
10/20/2011	8:30:55 AM	BCl3 MFC set to  0.000000
10/20/2011	8:30:55 AM	PHl3 MFC set to  0.000000
10/20/2011	8:30:55 AM	SiCl4 MFC set to  0.000000
10/20/2011	8:30:55 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	8:30:55 AM	Tube furnace set to 0
10/20/2011	8:30:56 AM	Run finished at 8:30 AM
10/20/2011	8:30:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	8:42:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	8:42:17 AM	Recipe started at 8:42 AM
10/20/2011	8:42:17 AM	Helium valve closed
10/20/2011	8:42:17 AM	H2 valve closed
10/20/2011	8:42:17 AM	BCl3 valve closed
10/20/2011	8:42:17 AM	PH3 valve closed
10/20/2011	8:42:17 AM	SiCl4 pre valve closed
10/20/2011	8:42:17 AM	SiCl4 post valve closed
10/20/2011	8:42:17 AM	Main Vac valve closed
10/20/2011	8:42:17 AM	Bubbler valve closed
10/20/2011	8:42:17 AM	Bypass valve opened
10/20/2011	8:42:17 AM	Helium MFC set to  0.000000
10/20/2011	8:42:17 AM	H2 MFC set to  0.000000
10/20/2011	8:42:17 AM	BCl3 MFC set to  0.000000
10/20/2011	8:42:17 AM	PHl3 MFC set to  0.000000
10/20/2011	8:42:17 AM	SiCl4 MFC set to  0.000000
10/20/2011	8:42:17 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	8:42:17 AM	Tube furnace set to 0
10/20/2011	9:46:46 AM	Run aborted at 9:46 AM
10/20/2011	9:46:46 AM	Helium valve closed
10/20/2011	9:46:46 AM	H2 valve closed
10/20/2011	9:46:46 AM	BCl3 valve closed
10/20/2011	9:46:46 AM	PH3 valve closed
10/20/2011	9:46:46 AM	SiCl4 pre valve closed
10/20/2011	9:46:46 AM	SiCl4 post valve closed
10/20/2011	9:46:46 AM	Bypass valve closed
10/20/2011	9:46:46 AM	Main Vac valve closed
10/20/2011	9:46:46 AM	Bubbler valve closed
10/20/2011	9:46:46 AM	Helium MFC set to  0.000000
10/20/2011	9:46:46 AM	H2 MFC set to  0.000000
10/20/2011	9:46:46 AM	BCl3 MFC set to  0.000000
10/20/2011	9:46:46 AM	PHl3 MFC set to  0.000000
10/20/2011	9:46:46 AM	SiCl4 MFC set to  0.000000
10/20/2011	9:46:46 AM	Tube furnace set to 0
10/20/2011	9:46:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	9:46:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	9:46:49 AM	Recipe started at 9:46 AM
10/20/2011	9:46:50 AM	Helium valve closed
10/20/2011	9:46:50 AM	H2 valve closed
10/20/2011	9:46:50 AM	BCl3 valve closed
10/20/2011	9:46:50 AM	PH3 valve closed
10/20/2011	9:46:50 AM	SiCl4 pre valve closed
10/20/2011	9:46:50 AM	SiCl4 post valve closed
10/20/2011	9:46:50 AM	Main Vac valve closed
10/20/2011	9:46:50 AM	Bubbler valve closed
10/20/2011	9:46:50 AM	Bypass valve opened
10/20/2011	9:46:50 AM	Helium MFC set to  0.000000
10/20/2011	9:46:50 AM	H2 MFC set to  0.000000
10/20/2011	9:46:50 AM	BCl3 MFC set to  0.000000
10/20/2011	9:46:50 AM	PHl3 MFC set to  0.000000
10/20/2011	9:46:50 AM	SiCl4 MFC set to  0.000000
10/20/2011	9:46:50 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	9:46:50 AM	Tube furnace set to 0
10/20/2011	10:01:28 AM	Run aborted at 10:01 AM
10/20/2011	10:01:28 AM	Helium valve closed
10/20/2011	10:01:28 AM	H2 valve closed
10/20/2011	10:01:28 AM	BCl3 valve closed
10/20/2011	10:01:28 AM	PH3 valve closed
10/20/2011	10:01:28 AM	SiCl4 pre valve closed
10/20/2011	10:01:28 AM	SiCl4 post valve closed
10/20/2011	10:01:28 AM	Bypass valve closed
10/20/2011	10:01:28 AM	Main Vac valve closed
10/20/2011	10:01:28 AM	Bubbler valve closed
10/20/2011	10:01:28 AM	Helium MFC set to  0.000000
10/20/2011	10:01:28 AM	H2 MFC set to  0.000000
10/20/2011	10:01:28 AM	BCl3 MFC set to  0.000000
10/20/2011	10:01:28 AM	PHl3 MFC set to  0.000000
10/20/2011	10:01:28 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:01:29 AM	Tube furnace set to 0
10/20/2011	10:01:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	10:01:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	10:01:32 AM	Recipe started at 10:01 AM
10/20/2011	10:01:32 AM	Helium valve closed
10/20/2011	10:01:32 AM	H2 valve closed
10/20/2011	10:01:32 AM	BCl3 valve closed
10/20/2011	10:01:32 AM	PH3 valve closed
10/20/2011	10:01:32 AM	SiCl4 pre valve closed
10/20/2011	10:01:32 AM	SiCl4 post valve closed
10/20/2011	10:01:32 AM	Main Vac valve closed
10/20/2011	10:01:32 AM	Bypass valve closed
10/20/2011	10:01:32 AM	Bubbler valve closed
10/20/2011	10:01:32 AM	Helium MFC set to  0.000000
10/20/2011	10:01:32 AM	H2 MFC set to  0.000000
10/20/2011	10:01:32 AM	BCl3 MFC set to  0.000000
10/20/2011	10:01:32 AM	PHl3 MFC set to  0.000000
10/20/2011	10:01:32 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:01:32 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:01:32 AM	Tube furnace set to 0
10/20/2011	10:01:35 AM	H2 valve closed
10/20/2011	10:01:35 AM	BCl3 valve closed
10/20/2011	10:01:35 AM	PH3 valve closed
10/20/2011	10:01:35 AM	SiCl4 pre valve closed
10/20/2011	10:01:35 AM	SiCl4 post valve closed
10/20/2011	10:01:35 AM	Main Vac valve closed
10/20/2011	10:01:35 AM	Bypass valve closed
10/20/2011	10:01:35 AM	Bubbler valve closed
10/20/2011	10:01:35 AM	Helium valve opened
10/20/2011	10:01:35 AM	Helium MFC set to  500.000000
10/20/2011	10:01:35 AM	H2 MFC set to  0.000000
10/20/2011	10:01:35 AM	BCl3 MFC set to  0.000000
10/20/2011	10:01:35 AM	PHl3 MFC set to  0.000000
10/20/2011	10:01:35 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:01:35 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:01:36 AM	Tube furnace set to 0
10/20/2011	10:02:16 AM	Helium valve closed
10/20/2011	10:02:16 AM	H2 valve closed
10/20/2011	10:02:16 AM	BCl3 valve closed
10/20/2011	10:02:16 AM	PH3 valve closed
10/20/2011	10:02:16 AM	SiCl4 pre valve closed
10/20/2011	10:02:16 AM	SiCl4 post valve closed
10/20/2011	10:02:16 AM	Main Vac valve closed
10/20/2011	10:02:16 AM	Bypass valve closed
10/20/2011	10:02:16 AM	Bubbler valve closed
10/20/2011	10:02:16 AM	Helium MFC set to  0.000000
10/20/2011	10:02:16 AM	H2 MFC set to  0.000000
10/20/2011	10:02:16 AM	BCl3 MFC set to  0.000000
10/20/2011	10:02:16 AM	PHl3 MFC set to  0.000000
10/20/2011	10:02:16 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:02:16 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:02:17 AM	Tube furnace set to 0
10/20/2011	10:02:18 AM	Run finished at 10:02 AM
10/20/2011	10:02:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	10:06:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	10:06:26 AM	Recipe started at 10:06 AM
10/20/2011	10:06:26 AM	Helium valve closed
10/20/2011	10:06:26 AM	H2 valve closed
10/20/2011	10:06:26 AM	BCl3 valve closed
10/20/2011	10:06:26 AM	PH3 valve closed
10/20/2011	10:06:26 AM	SiCl4 pre valve closed
10/20/2011	10:06:26 AM	SiCl4 post valve closed
10/20/2011	10:06:26 AM	Main Vac valve closed
10/20/2011	10:06:26 AM	Bubbler valve closed
10/20/2011	10:06:26 AM	Bypass valve opened
10/20/2011	10:06:26 AM	Helium MFC set to  0.000000
10/20/2011	10:06:26 AM	H2 MFC set to  0.000000
10/20/2011	10:06:26 AM	BCl3 MFC set to  0.000000
10/20/2011	10:06:26 AM	PHl3 MFC set to  0.000000
10/20/2011	10:06:26 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:06:26 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:06:26 AM	Tube furnace set to 0
10/20/2011	10:33:15 AM	Run aborted at 10:33 AM
10/20/2011	10:33:15 AM	Helium valve closed
10/20/2011	10:33:15 AM	H2 valve closed
10/20/2011	10:33:15 AM	BCl3 valve closed
10/20/2011	10:33:15 AM	PH3 valve closed
10/20/2011	10:33:15 AM	SiCl4 pre valve closed
10/20/2011	10:33:15 AM	SiCl4 post valve closed
10/20/2011	10:33:15 AM	Bypass valve closed
10/20/2011	10:33:15 AM	Main Vac valve closed
10/20/2011	10:33:15 AM	Bubbler valve closed
10/20/2011	10:33:15 AM	Helium MFC set to  0.000000
10/20/2011	10:33:15 AM	H2 MFC set to  0.000000
10/20/2011	10:33:15 AM	BCl3 MFC set to  0.000000
10/20/2011	10:33:15 AM	PHl3 MFC set to  0.000000
10/20/2011	10:33:15 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:33:16 AM	Tube furnace set to 0
10/20/2011	10:33:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	10:33:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	10:33:17 AM	Recipe started at 10:33 AM
10/20/2011	10:33:17 AM	Helium valve closed
10/20/2011	10:33:17 AM	H2 valve closed
10/20/2011	10:33:17 AM	BCl3 valve closed
10/20/2011	10:33:17 AM	PH3 valve closed
10/20/2011	10:33:17 AM	SiCl4 pre valve closed
10/20/2011	10:33:17 AM	SiCl4 post valve closed
10/20/2011	10:33:17 AM	Main Vac valve closed
10/20/2011	10:33:17 AM	Bypass valve closed
10/20/2011	10:33:17 AM	Bubbler valve closed
10/20/2011	10:33:17 AM	Helium MFC set to  0.000000
10/20/2011	10:33:17 AM	H2 MFC set to  0.000000
10/20/2011	10:33:17 AM	BCl3 MFC set to  0.000000
10/20/2011	10:33:17 AM	PHl3 MFC set to  0.000000
10/20/2011	10:33:17 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:33:17 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:33:17 AM	Tube furnace set to 0
10/20/2011	10:33:20 AM	H2 valve closed
10/20/2011	10:33:20 AM	BCl3 valve closed
10/20/2011	10:33:20 AM	PH3 valve closed
10/20/2011	10:33:20 AM	SiCl4 pre valve closed
10/20/2011	10:33:20 AM	SiCl4 post valve closed
10/20/2011	10:33:20 AM	Main Vac valve closed
10/20/2011	10:33:20 AM	Bypass valve closed
10/20/2011	10:33:20 AM	Bubbler valve closed
10/20/2011	10:33:20 AM	Helium valve opened
10/20/2011	10:33:20 AM	Helium MFC set to  500.000000
10/20/2011	10:33:20 AM	H2 MFC set to  0.000000
10/20/2011	10:33:20 AM	BCl3 MFC set to  0.000000
10/20/2011	10:33:20 AM	PHl3 MFC set to  0.000000
10/20/2011	10:33:20 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:33:20 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:33:20 AM	Tube furnace set to 0
10/20/2011	10:34:26 AM	Helium valve closed
10/20/2011	10:34:26 AM	H2 valve closed
10/20/2011	10:34:26 AM	BCl3 valve closed
10/20/2011	10:34:26 AM	PH3 valve closed
10/20/2011	10:34:26 AM	SiCl4 pre valve closed
10/20/2011	10:34:26 AM	SiCl4 post valve closed
10/20/2011	10:34:26 AM	Main Vac valve closed
10/20/2011	10:34:26 AM	Bypass valve closed
10/20/2011	10:34:26 AM	Bubbler valve closed
10/20/2011	10:34:26 AM	Helium MFC set to  0.000000
10/20/2011	10:34:26 AM	H2 MFC set to  0.000000
10/20/2011	10:34:26 AM	BCl3 MFC set to  0.000000
10/20/2011	10:34:26 AM	PHl3 MFC set to  0.000000
10/20/2011	10:34:26 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:34:26 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:34:26 AM	Tube furnace set to 0
10/20/2011	10:34:27 AM	Run finished at 10:34 AM
10/20/2011	10:34:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	10:34:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	10:34:42 AM	Recipe started at 10:34 AM
10/20/2011	10:34:42 AM	Helium valve closed
10/20/2011	10:34:42 AM	H2 valve closed
10/20/2011	10:34:42 AM	BCl3 valve closed
10/20/2011	10:34:42 AM	PH3 valve closed
10/20/2011	10:34:42 AM	SiCl4 pre valve closed
10/20/2011	10:34:42 AM	SiCl4 post valve closed
10/20/2011	10:34:42 AM	Main Vac valve closed
10/20/2011	10:34:42 AM	Bubbler valve closed
10/20/2011	10:34:42 AM	Bypass valve opened
10/20/2011	10:34:42 AM	Helium MFC set to  0.000000
10/20/2011	10:34:42 AM	H2 MFC set to  0.000000
10/20/2011	10:34:42 AM	BCl3 MFC set to  0.000000
10/20/2011	10:34:42 AM	PHl3 MFC set to  0.000000
10/20/2011	10:34:42 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:34:42 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:34:43 AM	Tube furnace set to 0
10/20/2011	10:36:36 AM	Helium valve closed
10/20/2011	10:36:36 AM	H2 valve closed
10/20/2011	10:36:36 AM	BCl3 valve closed
10/20/2011	10:36:36 AM	PH3 valve closed
10/20/2011	10:36:36 AM	SiCl4 pre valve closed
10/20/2011	10:36:36 AM	SiCl4 post valve closed
10/20/2011	10:36:36 AM	Main Vac valve closed
10/20/2011	10:36:36 AM	Bubbler valve closed
10/20/2011	10:36:36 AM	Bypass valve opened
10/20/2011	10:36:36 AM	Helium MFC set to  0.000000
10/20/2011	10:36:36 AM	H2 MFC set to  0.000000
10/20/2011	10:36:36 AM	BCl3 MFC set to  0.000000
10/20/2011	10:36:36 AM	PHl3 MFC set to  0.000000
10/20/2011	10:36:36 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:36:36 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:36:36 AM	Tube furnace set to 0
10/20/2011	10:36:37 AM	Helium valve closed
10/20/2011	10:36:37 AM	H2 valve closed
10/20/2011	10:36:37 AM	BCl3 valve closed
10/20/2011	10:36:37 AM	PH3 valve closed
10/20/2011	10:36:37 AM	SiCl4 pre valve closed
10/20/2011	10:36:37 AM	SiCl4 post valve closed
10/20/2011	10:36:37 AM	Bypass valve closed
10/20/2011	10:36:37 AM	Bubbler valve closed
10/20/2011	10:36:37 AM	Main Vac valve opened
10/20/2011	10:36:37 AM	Helium MFC set to  0.000000
10/20/2011	10:36:37 AM	H2 MFC set to  0.000000
10/20/2011	10:36:37 AM	BCl3 MFC set to  0.000000
10/20/2011	10:36:37 AM	PHl3 MFC set to  0.000000
10/20/2011	10:36:37 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:36:37 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:36:38 AM	Tube furnace set to 0
10/20/2011	10:36:39 AM	Run finished at 10:36 AM
10/20/2011	10:36:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	10:38:28 AM	Program exited cleanly
10/20/2011	10:40:33 AM	Program started normally
10/20/2011	10:40:33 AM	Helium valve closed
10/20/2011	10:40:33 AM	H2 valve closed
10/20/2011	10:40:33 AM	BCl3 valve closed
10/20/2011	10:40:33 AM	PH3 valve closed
10/20/2011	10:40:33 AM	SiCl4 pre valve closed
10/20/2011	10:40:33 AM	SiCl4 post valve closed
10/20/2011	10:40:33 AM	Main Vac valve closed
10/20/2011	10:40:33 AM	Bypass valve closed
10/20/2011	10:40:33 AM	Bubbler valve closed
10/20/2011	10:40:33 AM	Helium MFC set to  0.000000
10/20/2011	10:40:33 AM	H2 MFC set to  0.000000
10/20/2011	10:40:33 AM	BCl3 MFC set to  0.000000
10/20/2011	10:40:33 AM	PHl3 MFC set to  0.000000
10/20/2011	10:40:33 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:40:33 AM	Bypass solenoid MFC set to  760.000000
10/20/2011	10:40:34 AM	Tube furnace set to 0
10/20/2011	10:40:52 AM	Program exited cleanly
10/20/2011	10:41:30 AM	Program started normally
10/20/2011	10:41:30 AM	Helium valve closed
10/20/2011	10:41:30 AM	H2 valve closed
10/20/2011	10:41:30 AM	BCl3 valve closed
10/20/2011	10:41:30 AM	PH3 valve closed
10/20/2011	10:41:30 AM	SiCl4 pre valve closed
10/20/2011	10:41:30 AM	SiCl4 post valve closed
10/20/2011	10:41:30 AM	Main Vac valve closed
10/20/2011	10:41:30 AM	Bypass valve closed
10/20/2011	10:41:30 AM	Bubbler valve closed
10/20/2011	10:41:30 AM	Helium MFC set to  0.000000
10/20/2011	10:41:30 AM	H2 MFC set to  0.000000
10/20/2011	10:41:30 AM	BCl3 MFC set to  0.000000
10/20/2011	10:41:30 AM	PHl3 MFC set to  0.000000
10/20/2011	10:41:30 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:41:30 AM	Bypass solenoid MFC set to  760.000000
10/20/2011	10:41:30 AM	Tube furnace set to 0
10/20/2011	10:41:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	10:41:35 AM	Recipe started at 10:41 AM
10/20/2011	10:41:35 AM	Helium valve closed
10/20/2011	10:41:35 AM	H2 valve closed
10/20/2011	10:41:35 AM	BCl3 valve closed
10/20/2011	10:41:35 AM	PH3 valve closed
10/20/2011	10:41:35 AM	SiCl4 pre valve closed
10/20/2011	10:41:35 AM	SiCl4 post valve closed
10/20/2011	10:41:35 AM	Main Vac valve closed
10/20/2011	10:41:35 AM	Bypass valve closed
10/20/2011	10:41:35 AM	Bubbler valve closed
10/20/2011	10:41:35 AM	Helium MFC set to  0.000000
10/20/2011	10:41:35 AM	H2 MFC set to  0.000000
10/20/2011	10:41:35 AM	BCl3 MFC set to  0.000000
10/20/2011	10:41:35 AM	PHl3 MFC set to  0.000000
10/20/2011	10:41:35 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:41:35 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:41:35 AM	Tube furnace set to 0
10/20/2011	10:41:38 AM	H2 valve closed
10/20/2011	10:41:38 AM	BCl3 valve closed
10/20/2011	10:41:38 AM	PH3 valve closed
10/20/2011	10:41:38 AM	SiCl4 pre valve closed
10/20/2011	10:41:38 AM	SiCl4 post valve closed
10/20/2011	10:41:38 AM	Main Vac valve closed
10/20/2011	10:41:38 AM	Bypass valve closed
10/20/2011	10:41:38 AM	Bubbler valve closed
10/20/2011	10:41:38 AM	Helium valve opened
10/20/2011	10:41:38 AM	Helium MFC set to  500.000000
10/20/2011	10:41:38 AM	H2 MFC set to  0.000000
10/20/2011	10:41:38 AM	BCl3 MFC set to  0.000000
10/20/2011	10:41:38 AM	PHl3 MFC set to  0.000000
10/20/2011	10:41:38 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:41:38 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:41:38 AM	Tube furnace set to 0
10/20/2011	10:42:12 AM	Run aborted at 10:42 AM
10/20/2011	10:42:12 AM	Helium valve closed
10/20/2011	10:42:12 AM	H2 valve closed
10/20/2011	10:42:12 AM	BCl3 valve closed
10/20/2011	10:42:12 AM	PH3 valve closed
10/20/2011	10:42:12 AM	SiCl4 pre valve closed
10/20/2011	10:42:12 AM	SiCl4 post valve closed
10/20/2011	10:42:12 AM	Bypass valve closed
10/20/2011	10:42:12 AM	Main Vac valve closed
10/20/2011	10:42:12 AM	Bubbler valve closed
10/20/2011	10:42:12 AM	Helium MFC set to  0.000000
10/20/2011	10:42:12 AM	H2 MFC set to  0.000000
10/20/2011	10:42:12 AM	BCl3 MFC set to  0.000000
10/20/2011	10:42:12 AM	PHl3 MFC set to  0.000000
10/20/2011	10:42:12 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:42:13 AM	Tube furnace set to 0
10/20/2011	10:42:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	10:42:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	10:42:28 AM	Recipe started at 10:42 AM
10/20/2011	10:42:28 AM	Helium valve closed
10/20/2011	10:42:28 AM	H2 valve closed
10/20/2011	10:42:28 AM	BCl3 valve closed
10/20/2011	10:42:28 AM	PH3 valve closed
10/20/2011	10:42:28 AM	SiCl4 pre valve closed
10/20/2011	10:42:28 AM	SiCl4 post valve closed
10/20/2011	10:42:28 AM	Main Vac valve closed
10/20/2011	10:42:28 AM	Bypass valve closed
10/20/2011	10:42:28 AM	Bubbler valve closed
10/20/2011	10:42:28 AM	Helium MFC set to  0.000000
10/20/2011	10:42:28 AM	H2 MFC set to  0.000000
10/20/2011	10:42:28 AM	BCl3 MFC set to  0.000000
10/20/2011	10:42:28 AM	PHl3 MFC set to  0.000000
10/20/2011	10:42:28 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:42:28 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:42:28 AM	Tube furnace set to 0
10/20/2011	10:42:31 AM	H2 valve closed
10/20/2011	10:42:31 AM	BCl3 valve closed
10/20/2011	10:42:31 AM	PH3 valve closed
10/20/2011	10:42:31 AM	SiCl4 pre valve closed
10/20/2011	10:42:31 AM	SiCl4 post valve closed
10/20/2011	10:42:31 AM	Main Vac valve closed
10/20/2011	10:42:31 AM	Bypass valve closed
10/20/2011	10:42:31 AM	Bubbler valve closed
10/20/2011	10:42:31 AM	Helium valve opened
10/20/2011	10:42:31 AM	Helium MFC set to  500.000000
10/20/2011	10:42:31 AM	H2 MFC set to  0.000000
10/20/2011	10:42:31 AM	BCl3 MFC set to  0.000000
10/20/2011	10:42:31 AM	PHl3 MFC set to  0.000000
10/20/2011	10:42:31 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:42:31 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:42:32 AM	Tube furnace set to 0
10/20/2011	10:43:36 AM	Helium valve closed
10/20/2011	10:43:36 AM	H2 valve closed
10/20/2011	10:43:36 AM	BCl3 valve closed
10/20/2011	10:43:36 AM	PH3 valve closed
10/20/2011	10:43:36 AM	SiCl4 pre valve closed
10/20/2011	10:43:36 AM	SiCl4 post valve closed
10/20/2011	10:43:36 AM	Main Vac valve closed
10/20/2011	10:43:36 AM	Bypass valve closed
10/20/2011	10:43:36 AM	Bubbler valve closed
10/20/2011	10:43:36 AM	Helium MFC set to  0.000000
10/20/2011	10:43:36 AM	H2 MFC set to  0.000000
10/20/2011	10:43:36 AM	BCl3 MFC set to  0.000000
10/20/2011	10:43:36 AM	PHl3 MFC set to  0.000000
10/20/2011	10:43:36 AM	SiCl4 MFC set to  0.000000
10/20/2011	10:43:36 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:43:36 AM	Tube furnace set to 0
10/20/2011	10:43:37 AM	Run finished at 10:43 AM
10/20/2011	10:43:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2011	11:03:01 AM	Program started after a nonstandard shutdown
10/20/2011	11:03:01 AM	Helium valve closed
10/20/2011	11:03:01 AM	H2 valve closed
10/20/2011	11:03:01 AM	BCl3 valve closed
10/20/2011	11:03:01 AM	PH3 valve closed
10/20/2011	11:03:01 AM	SiCl4 pre valve closed
10/20/2011	11:03:01 AM	SiCl4 post valve closed
10/20/2011	11:03:01 AM	Main Vac valve closed
10/20/2011	11:03:01 AM	Bypass valve closed
10/20/2011	11:03:01 AM	Bubbler valve closed
10/20/2011	11:03:01 AM	Helium MFC set to  0.000000
10/20/2011	11:03:01 AM	H2 MFC set to  0.000000
10/20/2011	11:03:01 AM	BCl3 MFC set to  0.000000
10/20/2011	11:03:01 AM	PHl3 MFC set to  0.000000
10/20/2011	11:03:01 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:03:01 AM	Bypass solenoid MFC set to  760.000000
10/20/2011	11:03:01 AM	Tube furnace set to 0
10/20/2011	11:04:42 AM	Program started after a nonstandard shutdown
10/20/2011	11:04:42 AM	Helium valve closed
10/20/2011	11:04:42 AM	H2 valve closed
10/20/2011	11:04:42 AM	BCl3 valve closed
10/20/2011	11:04:42 AM	PH3 valve closed
10/20/2011	11:04:42 AM	SiCl4 pre valve closed
10/20/2011	11:04:42 AM	SiCl4 post valve closed
10/20/2011	11:04:42 AM	Main Vac valve closed
10/20/2011	11:04:42 AM	Bypass valve closed
10/20/2011	11:04:42 AM	Bubbler valve closed
10/20/2011	11:04:42 AM	Helium MFC set to  0.000000
10/20/2011	11:04:42 AM	H2 MFC set to  0.000000
10/20/2011	11:04:42 AM	BCl3 MFC set to  0.000000
10/20/2011	11:04:42 AM	PHl3 MFC set to  0.000000
10/20/2011	11:04:42 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:04:42 AM	Bypass solenoid MFC set to  760.000000
10/20/2011	11:04:43 AM	Tube furnace set to 0
10/20/2011	11:04:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	11:04:55 AM	Recipe started at 11:04 AM
10/20/2011	11:04:55 AM	Helium valve closed
10/20/2011	11:04:55 AM	H2 valve closed
10/20/2011	11:04:55 AM	BCl3 valve closed
10/20/2011	11:04:55 AM	PH3 valve closed
10/20/2011	11:04:55 AM	SiCl4 pre valve closed
10/20/2011	11:04:55 AM	SiCl4 post valve closed
10/20/2011	11:04:55 AM	Main Vac valve closed
10/20/2011	11:04:55 AM	Bubbler valve closed
10/20/2011	11:04:55 AM	Bypass valve opened
10/20/2011	11:04:55 AM	Helium MFC set to  0.000000
10/20/2011	11:04:55 AM	H2 MFC set to  0.000000
10/20/2011	11:04:55 AM	BCl3 MFC set to  0.000000
10/20/2011	11:04:55 AM	PHl3 MFC set to  0.000000
10/20/2011	11:04:55 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:04:55 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:04:55 AM	Tube furnace set to 0
10/20/2011	11:05:50 AM	Helium valve closed
10/20/2011	11:05:50 AM	H2 valve closed
10/20/2011	11:05:50 AM	BCl3 valve closed
10/20/2011	11:05:50 AM	PH3 valve closed
10/20/2011	11:05:50 AM	SiCl4 pre valve closed
10/20/2011	11:05:50 AM	SiCl4 post valve closed
10/20/2011	11:05:50 AM	Main Vac valve closed
10/20/2011	11:05:50 AM	Bubbler valve closed
10/20/2011	11:05:50 AM	Bypass valve opened
10/20/2011	11:05:50 AM	Helium MFC set to  0.000000
10/20/2011	11:05:50 AM	H2 MFC set to  0.000000
10/20/2011	11:05:50 AM	BCl3 MFC set to  0.000000
10/20/2011	11:05:50 AM	PHl3 MFC set to  0.000000
10/20/2011	11:05:50 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:05:50 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:05:50 AM	Tube furnace set to 0
10/20/2011	11:06:50 AM	Helium valve closed
10/20/2011	11:06:50 AM	H2 valve closed
10/20/2011	11:06:50 AM	BCl3 valve closed
10/20/2011	11:06:50 AM	PH3 valve closed
10/20/2011	11:06:50 AM	SiCl4 pre valve closed
10/20/2011	11:06:50 AM	SiCl4 post valve closed
10/20/2011	11:06:50 AM	Bypass valve closed
10/20/2011	11:06:50 AM	Bubbler valve closed
10/20/2011	11:06:50 AM	Main Vac valve opened
10/20/2011	11:06:50 AM	Helium MFC set to  0.000000
10/20/2011	11:06:50 AM	H2 MFC set to  0.000000
10/20/2011	11:06:50 AM	BCl3 MFC set to  0.000000
10/20/2011	11:06:50 AM	PHl3 MFC set to  0.000000
10/20/2011	11:06:50 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:06:50 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:06:50 AM	Tube furnace set to 0
10/20/2011	11:06:51 AM	Run finished at 11:06 AM
10/20/2011	11:06:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	11:07:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/20/2011	11:07:57 AM	Recipe started at 11:07 AM
10/20/2011	11:07:57 AM	Helium valve closed
10/20/2011	11:07:57 AM	H2 valve closed
10/20/2011	11:07:57 AM	BCl3 valve closed
10/20/2011	11:07:57 AM	PH3 valve closed
10/20/2011	11:07:57 AM	SiCl4 pre valve closed
10/20/2011	11:07:57 AM	SiCl4 post valve closed
10/20/2011	11:07:57 AM	Main Vac valve closed
10/20/2011	11:07:57 AM	Bubbler valve closed
10/20/2011	11:07:57 AM	Bypass valve opened
10/20/2011	11:07:57 AM	Helium MFC set to  0.000000
10/20/2011	11:07:57 AM	H2 MFC set to  0.000000
10/20/2011	11:07:57 AM	BCl3 MFC set to  0.000000
10/20/2011	11:07:57 AM	PHl3 MFC set to  0.000000
10/20/2011	11:07:57 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:07:57 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:07:57 AM	Tube furnace set to 0
10/20/2011	11:07:58 AM	Helium valve closed
10/20/2011	11:07:58 AM	H2 valve closed
10/20/2011	11:07:58 AM	BCl3 valve closed
10/20/2011	11:07:58 AM	PH3 valve closed
10/20/2011	11:07:58 AM	SiCl4 pre valve closed
10/20/2011	11:07:58 AM	SiCl4 post valve closed
10/20/2011	11:07:58 AM	Main Vac valve closed
10/20/2011	11:07:58 AM	Bubbler valve closed
10/20/2011	11:07:58 AM	Bypass valve opened
10/20/2011	11:07:58 AM	Helium MFC set to  0.000000
10/20/2011	11:07:58 AM	H2 MFC set to  0.000000
10/20/2011	11:07:58 AM	BCl3 MFC set to  0.000000
10/20/2011	11:07:58 AM	PHl3 MFC set to  0.000000
10/20/2011	11:07:58 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:07:58 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:07:58 AM	Tube furnace set to 0
10/20/2011	11:08:28 AM	Helium valve closed
10/20/2011	11:08:28 AM	H2 valve closed
10/20/2011	11:08:28 AM	BCl3 valve closed
10/20/2011	11:08:28 AM	PH3 valve closed
10/20/2011	11:08:28 AM	SiCl4 pre valve closed
10/20/2011	11:08:28 AM	SiCl4 post valve closed
10/20/2011	11:08:28 AM	Bypass valve closed
10/20/2011	11:08:28 AM	Bubbler valve closed
10/20/2011	11:08:28 AM	Main Vac valve opened
10/20/2011	11:08:28 AM	Helium MFC set to  0.000000
10/20/2011	11:08:28 AM	H2 MFC set to  0.000000
10/20/2011	11:08:28 AM	BCl3 MFC set to  0.000000
10/20/2011	11:08:28 AM	PHl3 MFC set to  0.000000
10/20/2011	11:08:28 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:08:28 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:08:28 AM	Tube furnace set to 0
10/20/2011	11:08:58 AM	H2 valve closed
10/20/2011	11:08:58 AM	BCl3 valve closed
10/20/2011	11:08:58 AM	PH3 valve closed
10/20/2011	11:08:58 AM	SiCl4 pre valve closed
10/20/2011	11:08:58 AM	SiCl4 post valve closed
10/20/2011	11:08:58 AM	Bypass valve closed
10/20/2011	11:08:58 AM	Bubbler valve closed
10/20/2011	11:08:58 AM	Helium valve opened
10/20/2011	11:08:58 AM	Main Vac valve opened
10/20/2011	11:08:58 AM	Helium MFC set to  20.000000
10/20/2011	11:08:58 AM	H2 MFC set to  0.000000
10/20/2011	11:08:58 AM	BCl3 MFC set to  0.000000
10/20/2011	11:08:58 AM	PHl3 MFC set to  0.000000
10/20/2011	11:08:58 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:08:58 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:08:58 AM	Tube furnace set to 0
10/20/2011	11:09:28 AM	Helium valve closed
10/20/2011	11:09:28 AM	H2 valve closed
10/20/2011	11:09:28 AM	BCl3 valve closed
10/20/2011	11:09:28 AM	PH3 valve closed
10/20/2011	11:09:28 AM	SiCl4 pre valve closed
10/20/2011	11:09:28 AM	SiCl4 post valve closed
10/20/2011	11:09:28 AM	Bypass valve closed
10/20/2011	11:09:28 AM	Bubbler valve closed
10/20/2011	11:09:28 AM	Main Vac valve opened
10/20/2011	11:09:28 AM	Helium MFC set to  0.000000
10/20/2011	11:09:28 AM	H2 MFC set to  0.000000
10/20/2011	11:09:28 AM	BCl3 MFC set to  0.000000
10/20/2011	11:09:28 AM	PHl3 MFC set to  0.000000
10/20/2011	11:09:28 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:09:28 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:09:29 AM	Tube furnace set to 0
10/20/2011	11:09:59 AM	H2 valve closed
10/20/2011	11:09:59 AM	BCl3 valve closed
10/20/2011	11:09:59 AM	PH3 valve closed
10/20/2011	11:09:59 AM	SiCl4 pre valve closed
10/20/2011	11:09:59 AM	SiCl4 post valve closed
10/20/2011	11:09:59 AM	Bypass valve closed
10/20/2011	11:09:59 AM	Bubbler valve closed
10/20/2011	11:09:59 AM	Helium valve opened
10/20/2011	11:09:59 AM	Main Vac valve opened
10/20/2011	11:09:59 AM	Helium MFC set to  20.000000
10/20/2011	11:09:59 AM	H2 MFC set to  0.000000
10/20/2011	11:09:59 AM	BCl3 MFC set to  0.000000
10/20/2011	11:09:59 AM	PHl3 MFC set to  0.000000
10/20/2011	11:09:59 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:09:59 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:09:59 AM	Tube furnace set to 0
10/20/2011	11:10:29 AM	Helium valve closed
10/20/2011	11:10:29 AM	H2 valve closed
10/20/2011	11:10:29 AM	BCl3 valve closed
10/20/2011	11:10:29 AM	PH3 valve closed
10/20/2011	11:10:29 AM	SiCl4 pre valve closed
10/20/2011	11:10:29 AM	SiCl4 post valve closed
10/20/2011	11:10:29 AM	Bypass valve closed
10/20/2011	11:10:29 AM	Bubbler valve closed
10/20/2011	11:10:29 AM	Main Vac valve opened
10/20/2011	11:10:29 AM	Helium MFC set to  0.000000
10/20/2011	11:10:29 AM	H2 MFC set to  0.000000
10/20/2011	11:10:29 AM	BCl3 MFC set to  0.000000
10/20/2011	11:10:29 AM	PHl3 MFC set to  0.000000
10/20/2011	11:10:29 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:10:29 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:10:29 AM	Tube furnace set to 0
10/20/2011	11:10:59 AM	H2 valve closed
10/20/2011	11:10:59 AM	BCl3 valve closed
10/20/2011	11:10:59 AM	PH3 valve closed
10/20/2011	11:10:59 AM	SiCl4 pre valve closed
10/20/2011	11:10:59 AM	SiCl4 post valve closed
10/20/2011	11:10:59 AM	Bypass valve closed
10/20/2011	11:10:59 AM	Bubbler valve closed
10/20/2011	11:10:59 AM	Helium valve opened
10/20/2011	11:10:59 AM	Main Vac valve opened
10/20/2011	11:10:59 AM	Helium MFC set to  20.000000
10/20/2011	11:10:59 AM	H2 MFC set to  0.000000
10/20/2011	11:10:59 AM	BCl3 MFC set to  0.000000
10/20/2011	11:10:59 AM	PHl3 MFC set to  0.000000
10/20/2011	11:10:59 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:10:59 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:10:59 AM	Tube furnace set to 0
10/20/2011	11:11:29 AM	Helium valve closed
10/20/2011	11:11:29 AM	H2 valve closed
10/20/2011	11:11:29 AM	BCl3 valve closed
10/20/2011	11:11:29 AM	PH3 valve closed
10/20/2011	11:11:29 AM	SiCl4 pre valve closed
10/20/2011	11:11:29 AM	SiCl4 post valve closed
10/20/2011	11:11:29 AM	Bypass valve closed
10/20/2011	11:11:29 AM	Bubbler valve closed
10/20/2011	11:11:29 AM	Main Vac valve opened
10/20/2011	11:11:29 AM	Helium MFC set to  0.000000
10/20/2011	11:11:29 AM	H2 MFC set to  0.000000
10/20/2011	11:11:29 AM	BCl3 MFC set to  0.000000
10/20/2011	11:11:29 AM	PHl3 MFC set to  0.000000
10/20/2011	11:11:29 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:11:29 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:11:29 AM	Tube furnace set to 0
10/20/2011	11:11:59 AM	H2 valve closed
10/20/2011	11:11:59 AM	BCl3 valve closed
10/20/2011	11:11:59 AM	PH3 valve closed
10/20/2011	11:11:59 AM	SiCl4 pre valve closed
10/20/2011	11:11:59 AM	SiCl4 post valve closed
10/20/2011	11:11:59 AM	Bypass valve closed
10/20/2011	11:11:59 AM	Bubbler valve closed
10/20/2011	11:11:59 AM	Helium valve opened
10/20/2011	11:11:59 AM	Main Vac valve opened
10/20/2011	11:11:59 AM	Helium MFC set to  20.000000
10/20/2011	11:11:59 AM	H2 MFC set to  0.000000
10/20/2011	11:11:59 AM	BCl3 MFC set to  0.000000
10/20/2011	11:11:59 AM	PHl3 MFC set to  0.000000
10/20/2011	11:11:59 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:11:59 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:12:00 AM	Tube furnace set to 0
10/20/2011	11:12:30 AM	Helium valve closed
10/20/2011	11:12:30 AM	H2 valve closed
10/20/2011	11:12:30 AM	BCl3 valve closed
10/20/2011	11:12:30 AM	PH3 valve closed
10/20/2011	11:12:30 AM	SiCl4 pre valve closed
10/20/2011	11:12:30 AM	SiCl4 post valve closed
10/20/2011	11:12:30 AM	Bypass valve closed
10/20/2011	11:12:30 AM	Bubbler valve closed
10/20/2011	11:12:30 AM	Main Vac valve opened
10/20/2011	11:12:30 AM	Helium MFC set to  0.000000
10/20/2011	11:12:30 AM	H2 MFC set to  0.000000
10/20/2011	11:12:30 AM	BCl3 MFC set to  0.000000
10/20/2011	11:12:30 AM	PHl3 MFC set to  0.000000
10/20/2011	11:12:30 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:12:30 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:12:30 AM	Tube furnace set to 0
10/20/2011	11:13:00 AM	H2 valve closed
10/20/2011	11:13:00 AM	BCl3 valve closed
10/20/2011	11:13:00 AM	PH3 valve closed
10/20/2011	11:13:00 AM	SiCl4 pre valve closed
10/20/2011	11:13:00 AM	SiCl4 post valve closed
10/20/2011	11:13:00 AM	Bypass valve closed
10/20/2011	11:13:00 AM	Bubbler valve closed
10/20/2011	11:13:00 AM	Helium valve opened
10/20/2011	11:13:00 AM	Main Vac valve opened
10/20/2011	11:13:00 AM	Helium MFC set to  20.000000
10/20/2011	11:13:00 AM	H2 MFC set to  0.000000
10/20/2011	11:13:00 AM	BCl3 MFC set to  0.000000
10/20/2011	11:13:00 AM	PHl3 MFC set to  0.000000
10/20/2011	11:13:00 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:13:00 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:13:00 AM	Tube furnace set to 0
10/20/2011	11:13:30 AM	Helium valve closed
10/20/2011	11:13:30 AM	H2 valve closed
10/20/2011	11:13:30 AM	BCl3 valve closed
10/20/2011	11:13:30 AM	PH3 valve closed
10/20/2011	11:13:30 AM	SiCl4 pre valve closed
10/20/2011	11:13:30 AM	SiCl4 post valve closed
10/20/2011	11:13:30 AM	Bypass valve closed
10/20/2011	11:13:30 AM	Bubbler valve closed
10/20/2011	11:13:30 AM	Main Vac valve opened
10/20/2011	11:13:30 AM	Helium MFC set to  0.000000
10/20/2011	11:13:30 AM	H2 MFC set to  0.000000
10/20/2011	11:13:30 AM	BCl3 MFC set to  0.000000
10/20/2011	11:13:30 AM	PHl3 MFC set to  0.000000
10/20/2011	11:13:30 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:13:30 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:13:30 AM	Tube furnace set to 0
10/20/2011	11:14:00 AM	H2 valve closed
10/20/2011	11:14:00 AM	BCl3 valve closed
10/20/2011	11:14:00 AM	PH3 valve closed
10/20/2011	11:14:00 AM	SiCl4 pre valve closed
10/20/2011	11:14:00 AM	SiCl4 post valve closed
10/20/2011	11:14:00 AM	Bypass valve closed
10/20/2011	11:14:00 AM	Bubbler valve closed
10/20/2011	11:14:00 AM	Helium valve opened
10/20/2011	11:14:00 AM	Main Vac valve opened
10/20/2011	11:14:00 AM	Helium MFC set to  20.000000
10/20/2011	11:14:00 AM	H2 MFC set to  0.000000
10/20/2011	11:14:00 AM	BCl3 MFC set to  0.000000
10/20/2011	11:14:00 AM	PHl3 MFC set to  0.000000
10/20/2011	11:14:00 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:14:00 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:14:00 AM	Tube furnace set to 0
10/20/2011	11:14:30 AM	Helium valve closed
10/20/2011	11:14:30 AM	H2 valve closed
10/20/2011	11:14:30 AM	BCl3 valve closed
10/20/2011	11:14:30 AM	PH3 valve closed
10/20/2011	11:14:30 AM	SiCl4 pre valve closed
10/20/2011	11:14:30 AM	SiCl4 post valve closed
10/20/2011	11:14:30 AM	Bypass valve closed
10/20/2011	11:14:30 AM	Bubbler valve closed
10/20/2011	11:14:30 AM	Main Vac valve opened
10/20/2011	11:14:30 AM	Helium MFC set to  0.000000
10/20/2011	11:14:30 AM	H2 MFC set to  0.000000
10/20/2011	11:14:30 AM	BCl3 MFC set to  0.000000
10/20/2011	11:14:30 AM	PHl3 MFC set to  0.000000
10/20/2011	11:14:30 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:14:30 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:14:31 AM	Tube furnace set to 0
10/20/2011	11:15:01 AM	H2 valve closed
10/20/2011	11:15:01 AM	BCl3 valve closed
10/20/2011	11:15:01 AM	PH3 valve closed
10/20/2011	11:15:01 AM	SiCl4 pre valve closed
10/20/2011	11:15:01 AM	SiCl4 post valve closed
10/20/2011	11:15:01 AM	Bypass valve closed
10/20/2011	11:15:01 AM	Bubbler valve closed
10/20/2011	11:15:01 AM	Helium valve opened
10/20/2011	11:15:01 AM	Main Vac valve opened
10/20/2011	11:15:01 AM	Helium MFC set to  20.000000
10/20/2011	11:15:01 AM	H2 MFC set to  0.000000
10/20/2011	11:15:01 AM	BCl3 MFC set to  0.000000
10/20/2011	11:15:01 AM	PHl3 MFC set to  0.000000
10/20/2011	11:15:01 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:15:01 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:15:01 AM	Tube furnace set to 0
10/20/2011	11:15:31 AM	Helium valve closed
10/20/2011	11:15:31 AM	H2 valve closed
10/20/2011	11:15:31 AM	BCl3 valve closed
10/20/2011	11:15:31 AM	PH3 valve closed
10/20/2011	11:15:31 AM	SiCl4 pre valve closed
10/20/2011	11:15:31 AM	SiCl4 post valve closed
10/20/2011	11:15:31 AM	Bypass valve closed
10/20/2011	11:15:31 AM	Bubbler valve closed
10/20/2011	11:15:31 AM	Main Vac valve opened
10/20/2011	11:15:31 AM	Helium MFC set to  0.000000
10/20/2011	11:15:31 AM	H2 MFC set to  0.000000
10/20/2011	11:15:31 AM	BCl3 MFC set to  0.000000
10/20/2011	11:15:31 AM	PHl3 MFC set to  0.000000
10/20/2011	11:15:31 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:15:31 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:15:31 AM	Tube furnace set to 0
10/20/2011	11:16:01 AM	H2 valve closed
10/20/2011	11:16:01 AM	BCl3 valve closed
10/20/2011	11:16:01 AM	PH3 valve closed
10/20/2011	11:16:01 AM	SiCl4 pre valve closed
10/20/2011	11:16:01 AM	SiCl4 post valve closed
10/20/2011	11:16:01 AM	Bypass valve closed
10/20/2011	11:16:01 AM	Bubbler valve closed
10/20/2011	11:16:01 AM	Helium valve opened
10/20/2011	11:16:01 AM	Main Vac valve opened
10/20/2011	11:16:01 AM	Helium MFC set to  20.000000
10/20/2011	11:16:01 AM	H2 MFC set to  0.000000
10/20/2011	11:16:01 AM	BCl3 MFC set to  0.000000
10/20/2011	11:16:01 AM	PHl3 MFC set to  0.000000
10/20/2011	11:16:01 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:16:01 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:16:01 AM	Tube furnace set to 0
10/20/2011	11:16:31 AM	Helium valve closed
10/20/2011	11:16:31 AM	H2 valve closed
10/20/2011	11:16:31 AM	BCl3 valve closed
10/20/2011	11:16:31 AM	PH3 valve closed
10/20/2011	11:16:31 AM	SiCl4 pre valve closed
10/20/2011	11:16:31 AM	SiCl4 post valve closed
10/20/2011	11:16:31 AM	Bypass valve closed
10/20/2011	11:16:31 AM	Bubbler valve closed
10/20/2011	11:16:31 AM	Main Vac valve opened
10/20/2011	11:16:31 AM	Helium MFC set to  0.000000
10/20/2011	11:16:31 AM	H2 MFC set to  0.000000
10/20/2011	11:16:31 AM	BCl3 MFC set to  0.000000
10/20/2011	11:16:31 AM	PHl3 MFC set to  0.000000
10/20/2011	11:16:31 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:16:31 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:16:31 AM	Tube furnace set to 0
10/20/2011	11:17:01 AM	H2 valve closed
10/20/2011	11:17:01 AM	BCl3 valve closed
10/20/2011	11:17:01 AM	PH3 valve closed
10/20/2011	11:17:01 AM	SiCl4 pre valve closed
10/20/2011	11:17:01 AM	SiCl4 post valve closed
10/20/2011	11:17:01 AM	Bypass valve closed
10/20/2011	11:17:01 AM	Bubbler valve closed
10/20/2011	11:17:01 AM	Helium valve opened
10/20/2011	11:17:01 AM	Main Vac valve opened
10/20/2011	11:17:01 AM	Helium MFC set to  20.000000
10/20/2011	11:17:01 AM	H2 MFC set to  0.000000
10/20/2011	11:17:01 AM	BCl3 MFC set to  0.000000
10/20/2011	11:17:01 AM	PHl3 MFC set to  0.000000
10/20/2011	11:17:02 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:17:02 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:17:02 AM	Tube furnace set to 0
10/20/2011	11:17:32 AM	Helium valve closed
10/20/2011	11:17:32 AM	H2 valve closed
10/20/2011	11:17:32 AM	BCl3 valve closed
10/20/2011	11:17:32 AM	PH3 valve closed
10/20/2011	11:17:32 AM	SiCl4 pre valve closed
10/20/2011	11:17:32 AM	SiCl4 post valve closed
10/20/2011	11:17:32 AM	Bypass valve closed
10/20/2011	11:17:32 AM	Bubbler valve closed
10/20/2011	11:17:32 AM	Main Vac valve opened
10/20/2011	11:17:32 AM	Helium MFC set to  0.000000
10/20/2011	11:17:32 AM	H2 MFC set to  0.000000
10/20/2011	11:17:32 AM	BCl3 MFC set to  0.000000
10/20/2011	11:17:32 AM	PHl3 MFC set to  0.000000
10/20/2011	11:17:32 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:17:32 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:17:32 AM	Tube furnace set to 0
10/20/2011	11:18:02 AM	H2 valve closed
10/20/2011	11:18:02 AM	BCl3 valve closed
10/20/2011	11:18:02 AM	PH3 valve closed
10/20/2011	11:18:02 AM	SiCl4 pre valve closed
10/20/2011	11:18:02 AM	SiCl4 post valve closed
10/20/2011	11:18:02 AM	Bypass valve closed
10/20/2011	11:18:02 AM	Bubbler valve closed
10/20/2011	11:18:02 AM	Helium valve opened
10/20/2011	11:18:02 AM	Main Vac valve opened
10/20/2011	11:18:02 AM	Helium MFC set to  20.000000
10/20/2011	11:18:02 AM	H2 MFC set to  0.000000
10/20/2011	11:18:02 AM	BCl3 MFC set to  0.000000
10/20/2011	11:18:02 AM	PHl3 MFC set to  0.000000
10/20/2011	11:18:02 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:18:02 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:18:02 AM	Tube furnace set to 0
10/20/2011	11:18:32 AM	Helium valve closed
10/20/2011	11:18:32 AM	H2 valve closed
10/20/2011	11:18:32 AM	BCl3 valve closed
10/20/2011	11:18:32 AM	PH3 valve closed
10/20/2011	11:18:32 AM	SiCl4 pre valve closed
10/20/2011	11:18:32 AM	SiCl4 post valve closed
10/20/2011	11:18:32 AM	Bypass valve closed
10/20/2011	11:18:32 AM	Bubbler valve closed
10/20/2011	11:18:32 AM	Main Vac valve opened
10/20/2011	11:18:32 AM	Helium MFC set to  0.000000
10/20/2011	11:18:32 AM	H2 MFC set to  0.000000
10/20/2011	11:18:32 AM	BCl3 MFC set to  0.000000
10/20/2011	11:18:32 AM	PHl3 MFC set to  0.000000
10/20/2011	11:18:32 AM	SiCl4 MFC set to  0.000000
10/20/2011	11:18:32 AM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:18:32 AM	Tube furnace set to 0
10/20/2011	11:18:33 AM	Run finished at 11:18 AM
10/20/2011	11:18:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/20/2011	12:08:49 PM	Recipe started at 12:08 PM
10/20/2011	12:08:49 PM	Helium valve closed
10/20/2011	12:08:49 PM	H2 valve closed
10/20/2011	12:08:49 PM	BCl3 valve closed
10/20/2011	12:08:49 PM	PH3 valve closed
10/20/2011	12:08:49 PM	SiCl4 pre valve closed
10/20/2011	12:08:49 PM	SiCl4 post valve closed
10/20/2011	12:08:49 PM	Main Vac valve closed
10/20/2011	12:08:49 PM	Bypass valve closed
10/20/2011	12:08:49 PM	Bubbler valve closed
10/20/2011	12:08:49 PM	Helium MFC set to  0.000000
10/20/2011	12:08:49 PM	H2 MFC set to  0.000000
10/20/2011	12:08:49 PM	BCl3 MFC set to  0.000000
10/20/2011	12:08:49 PM	PHl3 MFC set to  0.000000
10/20/2011	12:08:49 PM	SiCl4 MFC set to  0.000000
10/20/2011	12:08:49 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	12:08:49 PM	Tube furnace set to 0
10/20/2011	12:08:53 PM	Helium valve closed
10/20/2011	12:08:53 PM	BCl3 valve closed
10/20/2011	12:08:53 PM	PH3 valve closed
10/20/2011	12:08:53 PM	SiCl4 pre valve closed
10/20/2011	12:08:53 PM	SiCl4 post valve closed
10/20/2011	12:08:53 PM	Main Vac valve closed
10/20/2011	12:08:53 PM	Bypass valve closed
10/20/2011	12:08:53 PM	Bubbler valve closed
10/20/2011	12:08:53 PM	H2 valve opened
10/20/2011	12:08:53 PM	Helium MFC set to  0.000000
10/20/2011	12:08:53 PM	H2 MFC set to  500.000000
10/20/2011	12:08:53 PM	BCl3 MFC set to  0.000000
10/20/2011	12:08:53 PM	PHl3 MFC set to  0.000000
10/20/2011	12:08:53 PM	SiCl4 MFC set to  0.000000
10/20/2011	12:08:53 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	12:08:53 PM	Tube furnace set to 0
10/20/2011	12:10:01 PM	Helium valve closed
10/20/2011	12:10:01 PM	BCl3 valve closed
10/20/2011	12:10:01 PM	PH3 valve closed
10/20/2011	12:10:01 PM	SiCl4 pre valve closed
10/20/2011	12:10:01 PM	SiCl4 post valve closed
10/20/2011	12:10:01 PM	Main Vac valve closed
10/20/2011	12:10:01 PM	Bypass valve closed
10/20/2011	12:10:01 PM	H2 valve opened
10/20/2011	12:10:01 PM	Bubbler valve opened
10/20/2011	12:10:01 PM	Helium MFC set to  0.000000
10/20/2011	12:10:01 PM	H2 MFC set to  500.000000
10/20/2011	12:10:01 PM	BCl3 MFC set to  0.000000
10/20/2011	12:10:01 PM	PHl3 MFC set to  0.000000
10/20/2011	12:10:01 PM	SiCl4 MFC set to  0.000000
10/20/2011	12:10:01 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	12:10:01 PM	Tube furnace set to 0
10/20/2011	12:10:02 PM	Helium valve closed
10/20/2011	12:10:02 PM	BCl3 valve closed
10/20/2011	12:10:02 PM	PH3 valve closed
10/20/2011	12:10:02 PM	SiCl4 pre valve closed
10/20/2011	12:10:02 PM	SiCl4 post valve closed
10/20/2011	12:10:02 PM	Main Vac valve closed
10/20/2011	12:10:02 PM	Bypass valve closed
10/20/2011	12:10:02 PM	H2 valve opened
10/20/2011	12:10:02 PM	Bubbler valve opened
10/20/2011	12:10:02 PM	Helium MFC set to  0.000000
10/20/2011	12:10:02 PM	H2 MFC set to  500.000000
10/20/2011	12:10:02 PM	BCl3 MFC set to  0.000000
10/20/2011	12:10:02 PM	PHl3 MFC set to  0.000000
10/20/2011	12:10:02 PM	SiCl4 MFC set to  0.000000
10/20/2011	12:10:02 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	12:10:03 PM	Tube furnace set to 1000
10/20/2011	12:30:03 PM	Helium valve closed
10/20/2011	12:30:03 PM	BCl3 valve closed
10/20/2011	12:30:03 PM	PH3 valve closed
10/20/2011	12:30:03 PM	Main Vac valve closed
10/20/2011	12:30:03 PM	Bypass valve closed
10/20/2011	12:30:03 PM	H2 valve opened
10/20/2011	12:30:03 PM	SiCl4 pre valve opened
10/20/2011	12:30:03 PM	SiCl4 post valve opened
10/20/2011	12:30:03 PM	Bubbler valve opened
10/20/2011	12:30:03 PM	Helium MFC set to  0.000000
10/20/2011	12:30:03 PM	H2 MFC set to  500.000000
10/20/2011	12:30:03 PM	BCl3 MFC set to  0.000000
10/20/2011	12:30:03 PM	PHl3 MFC set to  0.000000
10/20/2011	12:30:03 PM	SiCl4 MFC set to  40.000000
10/20/2011	12:30:03 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	12:30:03 PM	Tube furnace set to 1000
10/20/2011	12:40:03 PM	H2 valve closed
10/20/2011	12:40:03 PM	BCl3 valve closed
10/20/2011	12:40:03 PM	PH3 valve closed
10/20/2011	12:40:03 PM	SiCl4 pre valve closed
10/20/2011	12:40:03 PM	SiCl4 post valve closed
10/20/2011	12:40:03 PM	Main Vac valve closed
10/20/2011	12:40:03 PM	Bypass valve closed
10/20/2011	12:40:03 PM	Helium valve opened
10/20/2011	12:40:03 PM	Bubbler valve opened
10/20/2011	12:40:03 PM	Helium MFC set to  500.000000
10/20/2011	12:40:03 PM	H2 MFC set to  0.000000
10/20/2011	12:40:03 PM	BCl3 MFC set to  0.000000
10/20/2011	12:40:03 PM	PHl3 MFC set to  0.000000
10/20/2011	12:40:03 PM	SiCl4 MFC set to  0.000000
10/20/2011	12:40:03 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	12:40:03 PM	Tube furnace set to 0
10/20/2011	1:20:03 PM	Helium valve closed
10/20/2011	1:20:03 PM	H2 valve closed
10/20/2011	1:20:03 PM	BCl3 valve closed
10/20/2011	1:20:03 PM	PH3 valve closed
10/20/2011	1:20:03 PM	SiCl4 pre valve closed
10/20/2011	1:20:03 PM	SiCl4 post valve closed
10/20/2011	1:20:03 PM	Main Vac valve closed
10/20/2011	1:20:03 PM	Bypass valve closed
10/20/2011	1:20:03 PM	Bubbler valve closed
10/20/2011	1:20:03 PM	Helium MFC set to  0.000000
10/20/2011	1:20:03 PM	H2 MFC set to  0.000000
10/20/2011	1:20:03 PM	BCl3 MFC set to  0.000000
10/20/2011	1:20:03 PM	PHl3 MFC set to  0.000000
10/20/2011	1:20:03 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:20:03 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:20:03 PM	Tube furnace set to 0
10/20/2011	1:20:04 PM	Run finished at 1:20 PM
10/20/2011	1:50:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	1:50:15 PM	Recipe started at 1:50 PM
10/20/2011	1:50:15 PM	Helium valve closed
10/20/2011	1:50:15 PM	H2 valve closed
10/20/2011	1:50:15 PM	BCl3 valve closed
10/20/2011	1:50:15 PM	PH3 valve closed
10/20/2011	1:50:15 PM	SiCl4 pre valve closed
10/20/2011	1:50:15 PM	SiCl4 post valve closed
10/20/2011	1:50:15 PM	Main Vac valve closed
10/20/2011	1:50:15 PM	Bubbler valve closed
10/20/2011	1:50:15 PM	Bypass valve opened
10/20/2011	1:50:15 PM	Helium MFC set to  0.000000
10/20/2011	1:50:15 PM	H2 MFC set to  0.000000
10/20/2011	1:50:15 PM	BCl3 MFC set to  0.000000
10/20/2011	1:50:15 PM	PHl3 MFC set to  0.000000
10/20/2011	1:50:15 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:50:15 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:50:15 PM	Tube furnace set to 0
10/20/2011	1:51:21 PM	Helium valve closed
10/20/2011	1:51:21 PM	H2 valve closed
10/20/2011	1:51:21 PM	BCl3 valve closed
10/20/2011	1:51:21 PM	PH3 valve closed
10/20/2011	1:51:21 PM	SiCl4 pre valve closed
10/20/2011	1:51:21 PM	SiCl4 post valve closed
10/20/2011	1:51:21 PM	Main Vac valve closed
10/20/2011	1:51:21 PM	Bubbler valve closed
10/20/2011	1:51:21 PM	Bypass valve opened
10/20/2011	1:51:21 PM	Helium MFC set to  0.000000
10/20/2011	1:51:21 PM	H2 MFC set to  0.000000
10/20/2011	1:51:21 PM	BCl3 MFC set to  0.000000
10/20/2011	1:51:21 PM	PHl3 MFC set to  0.000000
10/20/2011	1:51:21 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:51:21 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:51:21 PM	Tube furnace set to 0
10/20/2011	1:52:21 PM	Helium valve closed
10/20/2011	1:52:21 PM	H2 valve closed
10/20/2011	1:52:21 PM	BCl3 valve closed
10/20/2011	1:52:21 PM	PH3 valve closed
10/20/2011	1:52:21 PM	SiCl4 pre valve closed
10/20/2011	1:52:21 PM	SiCl4 post valve closed
10/20/2011	1:52:21 PM	Bypass valve closed
10/20/2011	1:52:21 PM	Bubbler valve closed
10/20/2011	1:52:21 PM	Main Vac valve opened
10/20/2011	1:52:21 PM	Helium MFC set to  0.000000
10/20/2011	1:52:21 PM	H2 MFC set to  0.000000
10/20/2011	1:52:21 PM	BCl3 MFC set to  0.000000
10/20/2011	1:52:21 PM	PHl3 MFC set to  0.000000
10/20/2011	1:52:21 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:52:21 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:52:21 PM	Tube furnace set to 0
10/20/2011	1:52:22 PM	Run finished at 1:52 PM
10/20/2011	1:52:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	1:56:30 PM	Recipe started at 1:56 PM
10/20/2011	1:56:30 PM	Helium valve closed
10/20/2011	1:56:30 PM	H2 valve closed
10/20/2011	1:56:30 PM	BCl3 valve closed
10/20/2011	1:56:30 PM	PH3 valve closed
10/20/2011	1:56:30 PM	SiCl4 pre valve closed
10/20/2011	1:56:30 PM	SiCl4 post valve closed
10/20/2011	1:56:30 PM	Main Vac valve closed
10/20/2011	1:56:30 PM	Bypass valve closed
10/20/2011	1:56:30 PM	Bubbler valve closed
10/20/2011	1:56:30 PM	Helium MFC set to  0.000000
10/20/2011	1:56:30 PM	H2 MFC set to  0.000000
10/20/2011	1:56:30 PM	BCl3 MFC set to  0.000000
10/20/2011	1:56:30 PM	PHl3 MFC set to  0.000000
10/20/2011	1:56:30 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:56:30 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:56:30 PM	Tube furnace set to 0
10/20/2011	1:56:33 PM	Helium valve closed
10/20/2011	1:56:33 PM	BCl3 valve closed
10/20/2011	1:56:33 PM	PH3 valve closed
10/20/2011	1:56:33 PM	SiCl4 pre valve closed
10/20/2011	1:56:33 PM	SiCl4 post valve closed
10/20/2011	1:56:33 PM	Main Vac valve closed
10/20/2011	1:56:33 PM	Bypass valve closed
10/20/2011	1:56:33 PM	Bubbler valve closed
10/20/2011	1:56:33 PM	H2 valve opened
10/20/2011	1:56:33 PM	Helium MFC set to  0.000000
10/20/2011	1:56:33 PM	H2 MFC set to  500.000000
10/20/2011	1:56:33 PM	BCl3 MFC set to  0.000000
10/20/2011	1:56:33 PM	PHl3 MFC set to  0.000000
10/20/2011	1:56:33 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:56:33 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:56:33 PM	Tube furnace set to 0
10/20/2011	1:57:38 PM	Helium valve closed
10/20/2011	1:57:38 PM	BCl3 valve closed
10/20/2011	1:57:38 PM	PH3 valve closed
10/20/2011	1:57:38 PM	SiCl4 pre valve closed
10/20/2011	1:57:38 PM	SiCl4 post valve closed
10/20/2011	1:57:38 PM	Main Vac valve closed
10/20/2011	1:57:38 PM	Bypass valve closed
10/20/2011	1:57:38 PM	H2 valve opened
10/20/2011	1:57:38 PM	Bubbler valve opened
10/20/2011	1:57:38 PM	Helium MFC set to  0.000000
10/20/2011	1:57:38 PM	H2 MFC set to  500.000000
10/20/2011	1:57:38 PM	BCl3 MFC set to  0.000000
10/20/2011	1:57:38 PM	PHl3 MFC set to  0.000000
10/20/2011	1:57:38 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:57:38 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:57:38 PM	Tube furnace set to 0
10/20/2011	1:57:39 PM	Helium valve closed
10/20/2011	1:57:39 PM	BCl3 valve closed
10/20/2011	1:57:39 PM	PH3 valve closed
10/20/2011	1:57:39 PM	SiCl4 pre valve closed
10/20/2011	1:57:39 PM	SiCl4 post valve closed
10/20/2011	1:57:39 PM	Main Vac valve closed
10/20/2011	1:57:39 PM	Bypass valve closed
10/20/2011	1:57:39 PM	H2 valve opened
10/20/2011	1:57:39 PM	Bubbler valve opened
10/20/2011	1:57:39 PM	Helium MFC set to  0.000000
10/20/2011	1:57:39 PM	H2 MFC set to  500.000000
10/20/2011	1:57:39 PM	BCl3 MFC set to  0.000000
10/20/2011	1:57:39 PM	PHl3 MFC set to  0.000000
10/20/2011	1:57:39 PM	SiCl4 MFC set to  0.000000
10/20/2011	1:57:39 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	1:57:40 PM	Tube furnace set to 1000
10/20/2011	2:17:39 PM	Helium valve closed
10/20/2011	2:17:39 PM	BCl3 valve closed
10/20/2011	2:17:40 PM	PH3 valve closed
10/20/2011	2:17:40 PM	Main Vac valve closed
10/20/2011	2:17:40 PM	Bypass valve closed
10/20/2011	2:17:40 PM	H2 valve opened
10/20/2011	2:17:40 PM	SiCl4 pre valve opened
10/20/2011	2:17:40 PM	SiCl4 post valve opened
10/20/2011	2:17:40 PM	Bubbler valve opened
10/20/2011	2:17:40 PM	Helium MFC set to  0.000000
10/20/2011	2:17:40 PM	H2 MFC set to  500.000000
10/20/2011	2:17:40 PM	BCl3 MFC set to  0.000000
10/20/2011	2:17:40 PM	PHl3 MFC set to  0.000000
10/20/2011	2:17:40 PM	SiCl4 MFC set to  40.000000
10/20/2011	2:17:40 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	2:17:40 PM	Tube furnace set to 1000
10/20/2011	2:27:40 PM	H2 valve closed
10/20/2011	2:27:40 PM	BCl3 valve closed
10/20/2011	2:27:40 PM	PH3 valve closed
10/20/2011	2:27:40 PM	SiCl4 pre valve closed
10/20/2011	2:27:40 PM	SiCl4 post valve closed
10/20/2011	2:27:40 PM	Main Vac valve closed
10/20/2011	2:27:40 PM	Bypass valve closed
10/20/2011	2:27:40 PM	Helium valve opened
10/20/2011	2:27:40 PM	Bubbler valve opened
10/20/2011	2:27:40 PM	Helium MFC set to  500.000000
10/20/2011	2:27:40 PM	H2 MFC set to  0.000000
10/20/2011	2:27:40 PM	BCl3 MFC set to  0.000000
10/20/2011	2:27:40 PM	PHl3 MFC set to  0.000000
10/20/2011	2:27:40 PM	SiCl4 MFC set to  0.000000
10/20/2011	2:27:40 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	2:27:40 PM	Tube furnace set to 0
10/20/2011	3:07:40 PM	Helium valve closed
10/20/2011	3:07:40 PM	H2 valve closed
10/20/2011	3:07:40 PM	BCl3 valve closed
10/20/2011	3:07:40 PM	PH3 valve closed
10/20/2011	3:07:40 PM	SiCl4 pre valve closed
10/20/2011	3:07:40 PM	SiCl4 post valve closed
10/20/2011	3:07:40 PM	Main Vac valve closed
10/20/2011	3:07:40 PM	Bypass valve closed
10/20/2011	3:07:40 PM	Bubbler valve closed
10/20/2011	3:07:40 PM	Helium MFC set to  0.000000
10/20/2011	3:07:40 PM	H2 MFC set to  0.000000
10/20/2011	3:07:40 PM	BCl3 MFC set to  0.000000
10/20/2011	3:07:40 PM	PHl3 MFC set to  0.000000
10/20/2011	3:07:40 PM	SiCl4 MFC set to  0.000000
10/20/2011	3:07:40 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	3:07:40 PM	Tube furnace set to 0
10/20/2011	3:07:41 PM	Run finished at 3:07 PM
10/20/2011	4:02:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	4:02:11 PM	Recipe started at 4:02 PM
10/20/2011	4:02:11 PM	Helium valve closed
10/20/2011	4:02:11 PM	H2 valve closed
10/20/2011	4:02:11 PM	BCl3 valve closed
10/20/2011	4:02:11 PM	PH3 valve closed
10/20/2011	4:02:11 PM	SiCl4 pre valve closed
10/20/2011	4:02:11 PM	SiCl4 post valve closed
10/20/2011	4:02:11 PM	Main Vac valve closed
10/20/2011	4:02:11 PM	Bubbler valve closed
10/20/2011	4:02:11 PM	Bypass valve opened
10/20/2011	4:02:11 PM	Helium MFC set to  0.000000
10/20/2011	4:02:11 PM	H2 MFC set to  0.000000
10/20/2011	4:02:11 PM	BCl3 MFC set to  0.000000
10/20/2011	4:02:11 PM	PHl3 MFC set to  0.000000
10/20/2011	4:02:11 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:02:11 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:02:12 PM	Tube furnace set to 0
10/20/2011	4:03:19 PM	Helium valve closed
10/20/2011	4:03:19 PM	H2 valve closed
10/20/2011	4:03:19 PM	BCl3 valve closed
10/20/2011	4:03:19 PM	PH3 valve closed
10/20/2011	4:03:19 PM	SiCl4 pre valve closed
10/20/2011	4:03:19 PM	SiCl4 post valve closed
10/20/2011	4:03:19 PM	Main Vac valve closed
10/20/2011	4:03:19 PM	Bubbler valve closed
10/20/2011	4:03:19 PM	Bypass valve opened
10/20/2011	4:03:19 PM	Helium MFC set to  0.000000
10/20/2011	4:03:19 PM	H2 MFC set to  0.000000
10/20/2011	4:03:19 PM	BCl3 MFC set to  0.000000
10/20/2011	4:03:19 PM	PHl3 MFC set to  0.000000
10/20/2011	4:03:19 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:03:19 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:03:19 PM	Tube furnace set to 0
10/20/2011	4:04:19 PM	Helium valve closed
10/20/2011	4:04:19 PM	H2 valve closed
10/20/2011	4:04:20 PM	BCl3 valve closed
10/20/2011	4:04:20 PM	PH3 valve closed
10/20/2011	4:04:20 PM	SiCl4 pre valve closed
10/20/2011	4:04:20 PM	SiCl4 post valve closed
10/20/2011	4:04:20 PM	Bypass valve closed
10/20/2011	4:04:20 PM	Bubbler valve closed
10/20/2011	4:04:20 PM	Main Vac valve opened
10/20/2011	4:04:20 PM	Helium MFC set to  0.000000
10/20/2011	4:04:20 PM	H2 MFC set to  0.000000
10/20/2011	4:04:20 PM	BCl3 MFC set to  0.000000
10/20/2011	4:04:20 PM	PHl3 MFC set to  0.000000
10/20/2011	4:04:20 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:04:20 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:04:20 PM	Tube furnace set to 0
10/20/2011	4:04:21 PM	Run finished at 4:04 PM
10/20/2011	4:04:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	4:05:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/20/2011	4:05:43 PM	Recipe started at 4:05 PM
10/20/2011	4:05:43 PM	Helium valve closed
10/20/2011	4:05:43 PM	H2 valve closed
10/20/2011	4:05:43 PM	BCl3 valve closed
10/20/2011	4:05:43 PM	PH3 valve closed
10/20/2011	4:05:43 PM	SiCl4 pre valve closed
10/20/2011	4:05:43 PM	SiCl4 post valve closed
10/20/2011	4:05:43 PM	Main Vac valve closed
10/20/2011	4:05:43 PM	Bubbler valve closed
10/20/2011	4:05:43 PM	Bypass valve opened
10/20/2011	4:05:43 PM	Helium MFC set to  0.000000
10/20/2011	4:05:43 PM	H2 MFC set to  0.000000
10/20/2011	4:05:43 PM	BCl3 MFC set to  0.000000
10/20/2011	4:05:43 PM	PHl3 MFC set to  0.000000
10/20/2011	4:05:43 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:05:43 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:05:43 PM	Tube furnace set to 0
10/20/2011	4:05:43 PM	Helium valve closed
10/20/2011	4:05:43 PM	H2 valve closed
10/20/2011	4:05:43 PM	BCl3 valve closed
10/20/2011	4:05:43 PM	PH3 valve closed
10/20/2011	4:05:43 PM	SiCl4 pre valve closed
10/20/2011	4:05:43 PM	SiCl4 post valve closed
10/20/2011	4:05:43 PM	Main Vac valve closed
10/20/2011	4:05:43 PM	Bubbler valve closed
10/20/2011	4:05:43 PM	Bypass valve opened
10/20/2011	4:05:43 PM	Helium MFC set to  0.000000
10/20/2011	4:05:43 PM	H2 MFC set to  0.000000
10/20/2011	4:05:43 PM	BCl3 MFC set to  0.000000
10/20/2011	4:05:43 PM	PHl3 MFC set to  0.000000
10/20/2011	4:05:43 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:05:43 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:05:43 PM	Tube furnace set to 0
10/20/2011	4:06:13 PM	Helium valve closed
10/20/2011	4:06:13 PM	H2 valve closed
10/20/2011	4:06:13 PM	BCl3 valve closed
10/20/2011	4:06:14 PM	PH3 valve closed
10/20/2011	4:06:14 PM	SiCl4 pre valve closed
10/20/2011	4:06:14 PM	SiCl4 post valve closed
10/20/2011	4:06:14 PM	Bypass valve closed
10/20/2011	4:06:14 PM	Bubbler valve closed
10/20/2011	4:06:14 PM	Main Vac valve opened
10/20/2011	4:06:14 PM	Helium MFC set to  0.000000
10/20/2011	4:06:14 PM	H2 MFC set to  0.000000
10/20/2011	4:06:14 PM	BCl3 MFC set to  0.000000
10/20/2011	4:06:14 PM	PHl3 MFC set to  0.000000
10/20/2011	4:06:14 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:06:14 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:06:14 PM	Tube furnace set to 0
10/20/2011	4:06:44 PM	H2 valve closed
10/20/2011	4:06:44 PM	BCl3 valve closed
10/20/2011	4:06:44 PM	PH3 valve closed
10/20/2011	4:06:44 PM	SiCl4 pre valve closed
10/20/2011	4:06:44 PM	SiCl4 post valve closed
10/20/2011	4:06:44 PM	Bypass valve closed
10/20/2011	4:06:44 PM	Bubbler valve closed
10/20/2011	4:06:44 PM	Helium valve opened
10/20/2011	4:06:44 PM	Main Vac valve opened
10/20/2011	4:06:44 PM	Helium MFC set to  20.000000
10/20/2011	4:06:44 PM	H2 MFC set to  0.000000
10/20/2011	4:06:44 PM	BCl3 MFC set to  0.000000
10/20/2011	4:06:44 PM	PHl3 MFC set to  0.000000
10/20/2011	4:06:44 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:06:44 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:06:44 PM	Tube furnace set to 0
10/20/2011	4:07:14 PM	Helium valve closed
10/20/2011	4:07:14 PM	H2 valve closed
10/20/2011	4:07:14 PM	BCl3 valve closed
10/20/2011	4:07:14 PM	PH3 valve closed
10/20/2011	4:07:14 PM	SiCl4 pre valve closed
10/20/2011	4:07:14 PM	SiCl4 post valve closed
10/20/2011	4:07:14 PM	Bypass valve closed
10/20/2011	4:07:14 PM	Bubbler valve closed
10/20/2011	4:07:14 PM	Main Vac valve opened
10/20/2011	4:07:14 PM	Helium MFC set to  0.000000
10/20/2011	4:07:14 PM	H2 MFC set to  0.000000
10/20/2011	4:07:14 PM	BCl3 MFC set to  0.000000
10/20/2011	4:07:14 PM	PHl3 MFC set to  0.000000
10/20/2011	4:07:14 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:07:14 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:07:14 PM	Tube furnace set to 0
10/20/2011	4:07:44 PM	H2 valve closed
10/20/2011	4:07:44 PM	BCl3 valve closed
10/20/2011	4:07:44 PM	PH3 valve closed
10/20/2011	4:07:44 PM	SiCl4 pre valve closed
10/20/2011	4:07:44 PM	SiCl4 post valve closed
10/20/2011	4:07:44 PM	Bypass valve closed
10/20/2011	4:07:44 PM	Bubbler valve closed
10/20/2011	4:07:44 PM	Helium valve opened
10/20/2011	4:07:44 PM	Main Vac valve opened
10/20/2011	4:07:44 PM	Helium MFC set to  20.000000
10/20/2011	4:07:44 PM	H2 MFC set to  0.000000
10/20/2011	4:07:44 PM	BCl3 MFC set to  0.000000
10/20/2011	4:07:44 PM	PHl3 MFC set to  0.000000
10/20/2011	4:07:44 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:07:44 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:07:44 PM	Tube furnace set to 0
10/20/2011	4:08:14 PM	Helium valve closed
10/20/2011	4:08:14 PM	H2 valve closed
10/20/2011	4:08:14 PM	BCl3 valve closed
10/20/2011	4:08:14 PM	PH3 valve closed
10/20/2011	4:08:14 PM	SiCl4 pre valve closed
10/20/2011	4:08:14 PM	SiCl4 post valve closed
10/20/2011	4:08:14 PM	Bypass valve closed
10/20/2011	4:08:14 PM	Bubbler valve closed
10/20/2011	4:08:14 PM	Main Vac valve opened
10/20/2011	4:08:14 PM	Helium MFC set to  0.000000
10/20/2011	4:08:14 PM	H2 MFC set to  0.000000
10/20/2011	4:08:14 PM	BCl3 MFC set to  0.000000
10/20/2011	4:08:14 PM	PHl3 MFC set to  0.000000
10/20/2011	4:08:14 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:08:14 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:08:14 PM	Tube furnace set to 0
10/20/2011	4:08:44 PM	H2 valve closed
10/20/2011	4:08:44 PM	BCl3 valve closed
10/20/2011	4:08:44 PM	PH3 valve closed
10/20/2011	4:08:44 PM	SiCl4 pre valve closed
10/20/2011	4:08:44 PM	SiCl4 post valve closed
10/20/2011	4:08:44 PM	Bypass valve closed
10/20/2011	4:08:44 PM	Bubbler valve closed
10/20/2011	4:08:44 PM	Helium valve opened
10/20/2011	4:08:44 PM	Main Vac valve opened
10/20/2011	4:08:44 PM	Helium MFC set to  20.000000
10/20/2011	4:08:44 PM	H2 MFC set to  0.000000
10/20/2011	4:08:44 PM	BCl3 MFC set to  0.000000
10/20/2011	4:08:45 PM	PHl3 MFC set to  0.000000
10/20/2011	4:08:45 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:08:45 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:08:45 PM	Tube furnace set to 0
10/20/2011	4:09:15 PM	Helium valve closed
10/20/2011	4:09:15 PM	H2 valve closed
10/20/2011	4:09:15 PM	BCl3 valve closed
10/20/2011	4:09:15 PM	PH3 valve closed
10/20/2011	4:09:15 PM	SiCl4 pre valve closed
10/20/2011	4:09:15 PM	SiCl4 post valve closed
10/20/2011	4:09:15 PM	Bypass valve closed
10/20/2011	4:09:15 PM	Bubbler valve closed
10/20/2011	4:09:15 PM	Main Vac valve opened
10/20/2011	4:09:15 PM	Helium MFC set to  0.000000
10/20/2011	4:09:15 PM	H2 MFC set to  0.000000
10/20/2011	4:09:15 PM	BCl3 MFC set to  0.000000
10/20/2011	4:09:15 PM	PHl3 MFC set to  0.000000
10/20/2011	4:09:15 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:09:15 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:09:15 PM	Tube furnace set to 0
10/20/2011	4:09:45 PM	H2 valve closed
10/20/2011	4:09:45 PM	BCl3 valve closed
10/20/2011	4:09:45 PM	PH3 valve closed
10/20/2011	4:09:45 PM	SiCl4 pre valve closed
10/20/2011	4:09:45 PM	SiCl4 post valve closed
10/20/2011	4:09:45 PM	Bypass valve closed
10/20/2011	4:09:45 PM	Bubbler valve closed
10/20/2011	4:09:45 PM	Helium valve opened
10/20/2011	4:09:45 PM	Main Vac valve opened
10/20/2011	4:09:45 PM	Helium MFC set to  20.000000
10/20/2011	4:09:45 PM	H2 MFC set to  0.000000
10/20/2011	4:09:45 PM	BCl3 MFC set to  0.000000
10/20/2011	4:09:45 PM	PHl3 MFC set to  0.000000
10/20/2011	4:09:45 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:09:45 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:09:45 PM	Tube furnace set to 0
10/20/2011	4:10:15 PM	Helium valve closed
10/20/2011	4:10:15 PM	H2 valve closed
10/20/2011	4:10:15 PM	BCl3 valve closed
10/20/2011	4:10:15 PM	PH3 valve closed
10/20/2011	4:10:15 PM	SiCl4 pre valve closed
10/20/2011	4:10:15 PM	SiCl4 post valve closed
10/20/2011	4:10:15 PM	Bypass valve closed
10/20/2011	4:10:15 PM	Bubbler valve closed
10/20/2011	4:10:15 PM	Main Vac valve opened
10/20/2011	4:10:15 PM	Helium MFC set to  0.000000
10/20/2011	4:10:15 PM	H2 MFC set to  0.000000
10/20/2011	4:10:15 PM	BCl3 MFC set to  0.000000
10/20/2011	4:10:15 PM	PHl3 MFC set to  0.000000
10/20/2011	4:10:15 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:10:15 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:10:15 PM	Tube furnace set to 0
10/20/2011	4:10:45 PM	H2 valve closed
10/20/2011	4:10:45 PM	BCl3 valve closed
10/20/2011	4:10:45 PM	PH3 valve closed
10/20/2011	4:10:45 PM	SiCl4 pre valve closed
10/20/2011	4:10:45 PM	SiCl4 post valve closed
10/20/2011	4:10:45 PM	Bypass valve closed
10/20/2011	4:10:45 PM	Bubbler valve closed
10/20/2011	4:10:45 PM	Helium valve opened
10/20/2011	4:10:45 PM	Main Vac valve opened
10/20/2011	4:10:45 PM	Helium MFC set to  20.000000
10/20/2011	4:10:45 PM	H2 MFC set to  0.000000
10/20/2011	4:10:45 PM	BCl3 MFC set to  0.000000
10/20/2011	4:10:45 PM	PHl3 MFC set to  0.000000
10/20/2011	4:10:45 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:10:45 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:10:45 PM	Tube furnace set to 0
10/20/2011	4:11:15 PM	Helium valve closed
10/20/2011	4:11:15 PM	H2 valve closed
10/20/2011	4:11:15 PM	BCl3 valve closed
10/20/2011	4:11:15 PM	PH3 valve closed
10/20/2011	4:11:15 PM	SiCl4 pre valve closed
10/20/2011	4:11:15 PM	SiCl4 post valve closed
10/20/2011	4:11:15 PM	Bypass valve closed
10/20/2011	4:11:15 PM	Bubbler valve closed
10/20/2011	4:11:15 PM	Main Vac valve opened
10/20/2011	4:11:15 PM	Helium MFC set to  0.000000
10/20/2011	4:11:15 PM	H2 MFC set to  0.000000
10/20/2011	4:11:15 PM	BCl3 MFC set to  0.000000
10/20/2011	4:11:15 PM	PHl3 MFC set to  0.000000
10/20/2011	4:11:15 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:11:15 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:11:16 PM	Tube furnace set to 0
10/20/2011	4:11:46 PM	H2 valve closed
10/20/2011	4:11:46 PM	BCl3 valve closed
10/20/2011	4:11:46 PM	PH3 valve closed
10/20/2011	4:11:46 PM	SiCl4 pre valve closed
10/20/2011	4:11:46 PM	SiCl4 post valve closed
10/20/2011	4:11:46 PM	Bypass valve closed
10/20/2011	4:11:46 PM	Bubbler valve closed
10/20/2011	4:11:46 PM	Helium valve opened
10/20/2011	4:11:46 PM	Main Vac valve opened
10/20/2011	4:11:46 PM	Helium MFC set to  20.000000
10/20/2011	4:11:46 PM	H2 MFC set to  0.000000
10/20/2011	4:11:46 PM	BCl3 MFC set to  0.000000
10/20/2011	4:11:46 PM	PHl3 MFC set to  0.000000
10/20/2011	4:11:46 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:11:46 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:11:46 PM	Tube furnace set to 0
10/20/2011	4:12:16 PM	Helium valve closed
10/20/2011	4:12:16 PM	H2 valve closed
10/20/2011	4:12:16 PM	BCl3 valve closed
10/20/2011	4:12:16 PM	PH3 valve closed
10/20/2011	4:12:16 PM	SiCl4 pre valve closed
10/20/2011	4:12:16 PM	SiCl4 post valve closed
10/20/2011	4:12:16 PM	Bypass valve closed
10/20/2011	4:12:16 PM	Bubbler valve closed
10/20/2011	4:12:16 PM	Main Vac valve opened
10/20/2011	4:12:16 PM	Helium MFC set to  0.000000
10/20/2011	4:12:16 PM	H2 MFC set to  0.000000
10/20/2011	4:12:16 PM	BCl3 MFC set to  0.000000
10/20/2011	4:12:16 PM	PHl3 MFC set to  0.000000
10/20/2011	4:12:16 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:12:16 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:12:16 PM	Tube furnace set to 0
10/20/2011	4:12:46 PM	H2 valve closed
10/20/2011	4:12:46 PM	BCl3 valve closed
10/20/2011	4:12:46 PM	PH3 valve closed
10/20/2011	4:12:46 PM	SiCl4 pre valve closed
10/20/2011	4:12:46 PM	SiCl4 post valve closed
10/20/2011	4:12:46 PM	Bypass valve closed
10/20/2011	4:12:46 PM	Bubbler valve closed
10/20/2011	4:12:46 PM	Helium valve opened
10/20/2011	4:12:46 PM	Main Vac valve opened
10/20/2011	4:12:46 PM	Helium MFC set to  20.000000
10/20/2011	4:12:46 PM	H2 MFC set to  0.000000
10/20/2011	4:12:46 PM	BCl3 MFC set to  0.000000
10/20/2011	4:12:46 PM	PHl3 MFC set to  0.000000
10/20/2011	4:12:46 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:12:46 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:12:46 PM	Tube furnace set to 0
10/20/2011	4:13:16 PM	Helium valve closed
10/20/2011	4:13:16 PM	H2 valve closed
10/20/2011	4:13:16 PM	BCl3 valve closed
10/20/2011	4:13:16 PM	PH3 valve closed
10/20/2011	4:13:16 PM	SiCl4 pre valve closed
10/20/2011	4:13:16 PM	SiCl4 post valve closed
10/20/2011	4:13:16 PM	Bypass valve closed
10/20/2011	4:13:16 PM	Bubbler valve closed
10/20/2011	4:13:16 PM	Main Vac valve opened
10/20/2011	4:13:16 PM	Helium MFC set to  0.000000
10/20/2011	4:13:16 PM	H2 MFC set to  0.000000
10/20/2011	4:13:16 PM	BCl3 MFC set to  0.000000
10/20/2011	4:13:16 PM	PHl3 MFC set to  0.000000
10/20/2011	4:13:16 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:13:16 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:13:16 PM	Tube furnace set to 0
10/20/2011	4:13:47 PM	H2 valve closed
10/20/2011	4:13:47 PM	BCl3 valve closed
10/20/2011	4:13:47 PM	PH3 valve closed
10/20/2011	4:13:47 PM	SiCl4 pre valve closed
10/20/2011	4:13:47 PM	SiCl4 post valve closed
10/20/2011	4:13:47 PM	Bypass valve closed
10/20/2011	4:13:47 PM	Bubbler valve closed
10/20/2011	4:13:47 PM	Helium valve opened
10/20/2011	4:13:47 PM	Main Vac valve opened
10/20/2011	4:13:47 PM	Helium MFC set to  20.000000
10/20/2011	4:13:47 PM	H2 MFC set to  0.000000
10/20/2011	4:13:47 PM	BCl3 MFC set to  0.000000
10/20/2011	4:13:47 PM	PHl3 MFC set to  0.000000
10/20/2011	4:13:47 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:13:47 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:13:47 PM	Tube furnace set to 0
10/20/2011	4:14:17 PM	Helium valve closed
10/20/2011	4:14:17 PM	H2 valve closed
10/20/2011	4:14:17 PM	BCl3 valve closed
10/20/2011	4:14:17 PM	PH3 valve closed
10/20/2011	4:14:17 PM	SiCl4 pre valve closed
10/20/2011	4:14:17 PM	SiCl4 post valve closed
10/20/2011	4:14:17 PM	Bypass valve closed
10/20/2011	4:14:17 PM	Bubbler valve closed
10/20/2011	4:14:17 PM	Main Vac valve opened
10/20/2011	4:14:17 PM	Helium MFC set to  0.000000
10/20/2011	4:14:17 PM	H2 MFC set to  0.000000
10/20/2011	4:14:17 PM	BCl3 MFC set to  0.000000
10/20/2011	4:14:17 PM	PHl3 MFC set to  0.000000
10/20/2011	4:14:17 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:14:17 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:14:17 PM	Tube furnace set to 0
10/20/2011	4:14:47 PM	H2 valve closed
10/20/2011	4:14:47 PM	BCl3 valve closed
10/20/2011	4:14:47 PM	PH3 valve closed
10/20/2011	4:14:47 PM	SiCl4 pre valve closed
10/20/2011	4:14:47 PM	SiCl4 post valve closed
10/20/2011	4:14:47 PM	Bypass valve closed
10/20/2011	4:14:47 PM	Bubbler valve closed
10/20/2011	4:14:47 PM	Helium valve opened
10/20/2011	4:14:47 PM	Main Vac valve opened
10/20/2011	4:14:47 PM	Helium MFC set to  20.000000
10/20/2011	4:14:47 PM	H2 MFC set to  0.000000
10/20/2011	4:14:47 PM	BCl3 MFC set to  0.000000
10/20/2011	4:14:47 PM	PHl3 MFC set to  0.000000
10/20/2011	4:14:47 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:14:47 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:14:47 PM	Tube furnace set to 0
10/20/2011	4:15:17 PM	Helium valve closed
10/20/2011	4:15:17 PM	H2 valve closed
10/20/2011	4:15:17 PM	BCl3 valve closed
10/20/2011	4:15:17 PM	PH3 valve closed
10/20/2011	4:15:17 PM	SiCl4 pre valve closed
10/20/2011	4:15:17 PM	SiCl4 post valve closed
10/20/2011	4:15:17 PM	Bypass valve closed
10/20/2011	4:15:17 PM	Bubbler valve closed
10/20/2011	4:15:17 PM	Main Vac valve opened
10/20/2011	4:15:17 PM	Helium MFC set to  0.000000
10/20/2011	4:15:17 PM	H2 MFC set to  0.000000
10/20/2011	4:15:17 PM	BCl3 MFC set to  0.000000
10/20/2011	4:15:17 PM	PHl3 MFC set to  0.000000
10/20/2011	4:15:17 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:15:17 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:15:17 PM	Tube furnace set to 0
10/20/2011	4:15:47 PM	H2 valve closed
10/20/2011	4:15:47 PM	BCl3 valve closed
10/20/2011	4:15:47 PM	PH3 valve closed
10/20/2011	4:15:47 PM	SiCl4 pre valve closed
10/20/2011	4:15:47 PM	SiCl4 post valve closed
10/20/2011	4:15:47 PM	Bypass valve closed
10/20/2011	4:15:47 PM	Bubbler valve closed
10/20/2011	4:15:47 PM	Helium valve opened
10/20/2011	4:15:47 PM	Main Vac valve opened
10/20/2011	4:15:47 PM	Helium MFC set to  20.000000
10/20/2011	4:15:47 PM	H2 MFC set to  0.000000
10/20/2011	4:15:47 PM	BCl3 MFC set to  0.000000
10/20/2011	4:15:47 PM	PHl3 MFC set to  0.000000
10/20/2011	4:15:47 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:15:47 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:15:48 PM	Tube furnace set to 0
10/20/2011	4:16:18 PM	Helium valve closed
10/20/2011	4:16:18 PM	H2 valve closed
10/20/2011	4:16:18 PM	BCl3 valve closed
10/20/2011	4:16:18 PM	PH3 valve closed
10/20/2011	4:16:18 PM	SiCl4 pre valve closed
10/20/2011	4:16:18 PM	SiCl4 post valve closed
10/20/2011	4:16:18 PM	Bypass valve closed
10/20/2011	4:16:18 PM	Bubbler valve closed
10/20/2011	4:16:18 PM	Main Vac valve opened
10/20/2011	4:16:18 PM	Helium MFC set to  0.000000
10/20/2011	4:16:18 PM	H2 MFC set to  0.000000
10/20/2011	4:16:18 PM	BCl3 MFC set to  0.000000
10/20/2011	4:16:18 PM	PHl3 MFC set to  0.000000
10/20/2011	4:16:18 PM	SiCl4 MFC set to  0.000000
10/20/2011	4:16:18 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	4:16:18 PM	Tube furnace set to 0
10/20/2011	4:16:19 PM	Run finished at 4:16 PM
10/20/2011	4:16:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/20/2011	6:19:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/20/2011	6:19:24 PM	Recipe started at 6:19 PM
10/20/2011	6:19:24 PM	Helium valve closed
10/20/2011	6:19:24 PM	H2 valve closed
10/20/2011	6:19:24 PM	BCl3 valve closed
10/20/2011	6:19:24 PM	PH3 valve closed
10/20/2011	6:19:24 PM	SiCl4 pre valve closed
10/20/2011	6:19:24 PM	SiCl4 post valve closed
10/20/2011	6:19:24 PM	Main Vac valve closed
10/20/2011	6:19:24 PM	Bypass valve closed
10/20/2011	6:19:24 PM	Bubbler valve closed
10/20/2011	6:19:24 PM	Helium MFC set to  0.000000
10/20/2011	6:19:24 PM	H2 MFC set to  0.000000
10/20/2011	6:19:24 PM	BCl3 MFC set to  0.000000
10/20/2011	6:19:24 PM	PHl3 MFC set to  0.000000
10/20/2011	6:19:24 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:19:24 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:19:24 PM	Tube furnace set to 0
10/20/2011	6:19:24 PM	Run finished at 6:19 PM
10/20/2011	6:19:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/20/2011	6:19:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	6:19:38 PM	Recipe started at 6:19 PM
10/20/2011	6:19:39 PM	Helium valve closed
10/20/2011	6:19:39 PM	H2 valve closed
10/20/2011	6:19:39 PM	BCl3 valve closed
10/20/2011	6:19:39 PM	PH3 valve closed
10/20/2011	6:19:39 PM	SiCl4 pre valve closed
10/20/2011	6:19:39 PM	SiCl4 post valve closed
10/20/2011	6:19:39 PM	Main Vac valve closed
10/20/2011	6:19:39 PM	Bubbler valve closed
10/20/2011	6:19:39 PM	Bypass valve opened
10/20/2011	6:19:39 PM	Helium MFC set to  0.000000
10/20/2011	6:19:39 PM	H2 MFC set to  0.000000
10/20/2011	6:19:39 PM	BCl3 MFC set to  0.000000
10/20/2011	6:19:39 PM	PHl3 MFC set to  0.000000
10/20/2011	6:19:39 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:19:39 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:19:39 PM	Tube furnace set to 0
10/20/2011	6:19:39 PM	Helium valve closed
10/20/2011	6:19:39 PM	H2 valve closed
10/20/2011	6:19:39 PM	BCl3 valve closed
10/20/2011	6:19:39 PM	PH3 valve closed
10/20/2011	6:19:39 PM	SiCl4 pre valve closed
10/20/2011	6:19:39 PM	SiCl4 post valve closed
10/20/2011	6:19:39 PM	Main Vac valve closed
10/20/2011	6:19:39 PM	Bubbler valve closed
10/20/2011	6:19:39 PM	Bypass valve opened
10/20/2011	6:19:39 PM	Helium MFC set to  0.000000
10/20/2011	6:19:39 PM	H2 MFC set to  0.000000
10/20/2011	6:19:39 PM	BCl3 MFC set to  0.000000
10/20/2011	6:19:39 PM	PHl3 MFC set to  0.000000
10/20/2011	6:19:39 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:19:39 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:19:39 PM	Tube furnace set to 0
10/20/2011	6:20:39 PM	Helium valve closed
10/20/2011	6:20:39 PM	H2 valve closed
10/20/2011	6:20:39 PM	BCl3 valve closed
10/20/2011	6:20:39 PM	PH3 valve closed
10/20/2011	6:20:39 PM	SiCl4 pre valve closed
10/20/2011	6:20:39 PM	SiCl4 post valve closed
10/20/2011	6:20:39 PM	Bypass valve closed
10/20/2011	6:20:39 PM	Bubbler valve closed
10/20/2011	6:20:39 PM	Main Vac valve opened
10/20/2011	6:20:39 PM	Helium MFC set to  0.000000
10/20/2011	6:20:39 PM	H2 MFC set to  0.000000
10/20/2011	6:20:39 PM	BCl3 MFC set to  0.000000
10/20/2011	6:20:39 PM	PHl3 MFC set to  0.000000
10/20/2011	6:20:39 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:20:39 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:20:39 PM	Tube furnace set to 0
10/20/2011	6:20:40 PM	Run finished at 6:20 PM
10/20/2011	6:20:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	6:21:46 PM	Recipe started at 6:21 PM
10/20/2011	6:21:46 PM	Helium valve closed
10/20/2011	6:21:46 PM	H2 valve closed
10/20/2011	6:21:46 PM	BCl3 valve closed
10/20/2011	6:21:46 PM	PH3 valve closed
10/20/2011	6:21:46 PM	SiCl4 pre valve closed
10/20/2011	6:21:46 PM	SiCl4 post valve closed
10/20/2011	6:21:46 PM	Main Vac valve closed
10/20/2011	6:21:46 PM	Bypass valve closed
10/20/2011	6:21:46 PM	Bubbler valve closed
10/20/2011	6:21:46 PM	Helium MFC set to  0.000000
10/20/2011	6:21:46 PM	H2 MFC set to  0.000000
10/20/2011	6:21:46 PM	BCl3 MFC set to  0.000000
10/20/2011	6:21:46 PM	PHl3 MFC set to  0.000000
10/20/2011	6:21:46 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:21:46 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:21:46 PM	Tube furnace set to 0
10/20/2011	6:21:49 PM	Helium valve closed
10/20/2011	6:21:49 PM	BCl3 valve closed
10/20/2011	6:21:49 PM	PH3 valve closed
10/20/2011	6:21:49 PM	SiCl4 pre valve closed
10/20/2011	6:21:49 PM	SiCl4 post valve closed
10/20/2011	6:21:49 PM	Main Vac valve closed
10/20/2011	6:21:49 PM	Bypass valve closed
10/20/2011	6:21:49 PM	Bubbler valve closed
10/20/2011	6:21:49 PM	H2 valve opened
10/20/2011	6:21:49 PM	Helium MFC set to  0.000000
10/20/2011	6:21:49 PM	H2 MFC set to  500.000000
10/20/2011	6:21:49 PM	BCl3 MFC set to  0.000000
10/20/2011	6:21:49 PM	PHl3 MFC set to  0.000000
10/20/2011	6:21:49 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:21:49 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:21:49 PM	Tube furnace set to 0
10/20/2011	6:22:58 PM	Helium valve closed
10/20/2011	6:22:58 PM	BCl3 valve closed
10/20/2011	6:22:58 PM	PH3 valve closed
10/20/2011	6:22:58 PM	SiCl4 pre valve closed
10/20/2011	6:22:58 PM	SiCl4 post valve closed
10/20/2011	6:22:58 PM	Main Vac valve closed
10/20/2011	6:22:58 PM	Bypass valve closed
10/20/2011	6:22:58 PM	H2 valve opened
10/20/2011	6:22:58 PM	Bubbler valve opened
10/20/2011	6:22:58 PM	Helium MFC set to  0.000000
10/20/2011	6:22:58 PM	H2 MFC set to  500.000000
10/20/2011	6:22:58 PM	BCl3 MFC set to  0.000000
10/20/2011	6:22:58 PM	PHl3 MFC set to  0.000000
10/20/2011	6:22:58 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:22:58 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:22:58 PM	Tube furnace set to 0
10/20/2011	6:22:59 PM	Helium valve closed
10/20/2011	6:22:59 PM	BCl3 valve closed
10/20/2011	6:22:59 PM	PH3 valve closed
10/20/2011	6:22:59 PM	SiCl4 pre valve closed
10/20/2011	6:22:59 PM	SiCl4 post valve closed
10/20/2011	6:22:59 PM	Main Vac valve closed
10/20/2011	6:22:59 PM	Bypass valve closed
10/20/2011	6:22:59 PM	H2 valve opened
10/20/2011	6:22:59 PM	Bubbler valve opened
10/20/2011	6:22:59 PM	Helium MFC set to  0.000000
10/20/2011	6:22:59 PM	H2 MFC set to  500.000000
10/20/2011	6:22:59 PM	BCl3 MFC set to  0.000000
10/20/2011	6:22:59 PM	PHl3 MFC set to  0.000000
10/20/2011	6:22:59 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:22:59 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:22:59 PM	Tube furnace set to 1000
10/20/2011	6:42:59 PM	Helium valve closed
10/20/2011	6:42:59 PM	BCl3 valve closed
10/20/2011	6:42:59 PM	PH3 valve closed
10/20/2011	6:42:59 PM	Main Vac valve closed
10/20/2011	6:42:59 PM	Bypass valve closed
10/20/2011	6:42:59 PM	H2 valve opened
10/20/2011	6:42:59 PM	SiCl4 pre valve opened
10/20/2011	6:42:59 PM	SiCl4 post valve opened
10/20/2011	6:42:59 PM	Bubbler valve opened
10/20/2011	6:42:59 PM	Helium MFC set to  0.000000
10/20/2011	6:42:59 PM	H2 MFC set to  500.000000
10/20/2011	6:42:59 PM	BCl3 MFC set to  0.000000
10/20/2011	6:42:59 PM	PHl3 MFC set to  0.000000
10/20/2011	6:42:59 PM	SiCl4 MFC set to  40.000000
10/20/2011	6:42:59 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:42:59 PM	Tube furnace set to 1000
10/20/2011	6:52:59 PM	H2 valve closed
10/20/2011	6:52:59 PM	BCl3 valve closed
10/20/2011	6:52:59 PM	PH3 valve closed
10/20/2011	6:52:59 PM	SiCl4 pre valve closed
10/20/2011	6:52:59 PM	SiCl4 post valve closed
10/20/2011	6:52:59 PM	Main Vac valve closed
10/20/2011	6:52:59 PM	Bypass valve closed
10/20/2011	6:52:59 PM	Helium valve opened
10/20/2011	6:52:59 PM	Bubbler valve opened
10/20/2011	6:52:59 PM	Helium MFC set to  500.000000
10/20/2011	6:52:59 PM	H2 MFC set to  0.000000
10/20/2011	6:52:59 PM	BCl3 MFC set to  0.000000
10/20/2011	6:52:59 PM	PHl3 MFC set to  0.000000
10/20/2011	6:52:59 PM	SiCl4 MFC set to  0.000000
10/20/2011	6:52:59 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	6:52:59 PM	Tube furnace set to 0
10/20/2011	7:13:26 PM	Helium valve closed
10/20/2011	7:13:26 PM	H2 valve closed
10/20/2011	7:13:26 PM	BCl3 valve closed
10/20/2011	7:13:26 PM	PH3 valve closed
10/20/2011	7:13:26 PM	SiCl4 pre valve closed
10/20/2011	7:13:26 PM	SiCl4 post valve closed
10/20/2011	7:13:26 PM	Main Vac valve closed
10/20/2011	7:13:26 PM	Bubbler valve closed
10/20/2011	7:13:26 PM	Bypass valve closed
10/20/2011	7:13:26 PM	Helium MFC set to  0.000000
10/20/2011	7:13:26 PM	H2 MFC set to  0.000000
10/20/2011	7:13:26 PM	BCl3 MFC set to  0.000000
10/20/2011	7:13:26 PM	PHl3 MFC set to  0.000000
10/20/2011	7:13:26 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:13:26 PM	Bypass solenoid MFC set to  760.000000
10/20/2011	7:13:26 PM	Tube furnace set to 0
10/20/2011	7:13:26 PM	Baratron reads 743.359977 Torr and NaOH valve is open.  Emergency exit.
10/20/2011	7:20:11 PM	Run aborted at 7:20 PM
10/20/2011	7:20:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	7:20:17 PM	Recipe started at 7:20 PM
10/20/2011	7:20:17 PM	Helium valve closed
10/20/2011	7:20:17 PM	H2 valve closed
10/20/2011	7:20:17 PM	BCl3 valve closed
10/20/2011	7:20:17 PM	PH3 valve closed
10/20/2011	7:20:17 PM	SiCl4 pre valve closed
10/20/2011	7:20:17 PM	SiCl4 post valve closed
10/20/2011	7:20:17 PM	Main Vac valve closed
10/20/2011	7:20:17 PM	Bubbler valve closed
10/20/2011	7:20:17 PM	Bypass valve opened
10/20/2011	7:20:17 PM	Helium MFC set to  0.000000
10/20/2011	7:20:17 PM	H2 MFC set to  0.000000
10/20/2011	7:20:17 PM	BCl3 MFC set to  0.000000
10/20/2011	7:20:17 PM	PHl3 MFC set to  0.000000
10/20/2011	7:20:17 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:20:17 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:20:17 PM	Tube furnace set to 0
10/20/2011	7:21:24 PM	Helium valve closed
10/20/2011	7:21:24 PM	H2 valve closed
10/20/2011	7:21:24 PM	BCl3 valve closed
10/20/2011	7:21:24 PM	PH3 valve closed
10/20/2011	7:21:24 PM	SiCl4 pre valve closed
10/20/2011	7:21:24 PM	SiCl4 post valve closed
10/20/2011	7:21:24 PM	Main Vac valve closed
10/20/2011	7:21:24 PM	Bubbler valve closed
10/20/2011	7:21:24 PM	Bypass valve opened
10/20/2011	7:21:24 PM	Helium MFC set to  0.000000
10/20/2011	7:21:24 PM	H2 MFC set to  0.000000
10/20/2011	7:21:24 PM	BCl3 MFC set to  0.000000
10/20/2011	7:21:24 PM	PHl3 MFC set to  0.000000
10/20/2011	7:21:24 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:21:24 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:21:24 PM	Tube furnace set to 0
10/20/2011	7:22:24 PM	Helium valve closed
10/20/2011	7:22:24 PM	H2 valve closed
10/20/2011	7:22:24 PM	BCl3 valve closed
10/20/2011	7:22:24 PM	PH3 valve closed
10/20/2011	7:22:24 PM	SiCl4 pre valve closed
10/20/2011	7:22:24 PM	SiCl4 post valve closed
10/20/2011	7:22:24 PM	Bypass valve closed
10/20/2011	7:22:24 PM	Bubbler valve closed
10/20/2011	7:22:24 PM	Main Vac valve opened
10/20/2011	7:22:24 PM	Helium MFC set to  0.000000
10/20/2011	7:22:24 PM	H2 MFC set to  0.000000
10/20/2011	7:22:24 PM	BCl3 MFC set to  0.000000
10/20/2011	7:22:24 PM	PHl3 MFC set to  0.000000
10/20/2011	7:22:24 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:22:24 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:22:24 PM	Tube furnace set to 0
10/20/2011	7:22:25 PM	Run finished at 7:22 PM
10/20/2011	7:22:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	7:25:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/20/2011	7:25:20 PM	Recipe started at 7:25 PM
10/20/2011	7:25:20 PM	Helium valve closed
10/20/2011	7:25:20 PM	H2 valve closed
10/20/2011	7:25:20 PM	BCl3 valve closed
10/20/2011	7:25:20 PM	PH3 valve closed
10/20/2011	7:25:20 PM	SiCl4 pre valve closed
10/20/2011	7:25:20 PM	SiCl4 post valve closed
10/20/2011	7:25:20 PM	Main Vac valve closed
10/20/2011	7:25:20 PM	Bubbler valve closed
10/20/2011	7:25:20 PM	Bypass valve opened
10/20/2011	7:25:20 PM	Helium MFC set to  0.000000
10/20/2011	7:25:20 PM	H2 MFC set to  0.000000
10/20/2011	7:25:20 PM	BCl3 MFC set to  0.000000
10/20/2011	7:25:20 PM	PHl3 MFC set to  0.000000
10/20/2011	7:25:20 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:25:20 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:25:20 PM	Tube furnace set to 0
10/20/2011	7:25:21 PM	Helium valve closed
10/20/2011	7:25:21 PM	H2 valve closed
10/20/2011	7:25:21 PM	BCl3 valve closed
10/20/2011	7:25:21 PM	PH3 valve closed
10/20/2011	7:25:21 PM	SiCl4 pre valve closed
10/20/2011	7:25:21 PM	SiCl4 post valve closed
10/20/2011	7:25:21 PM	Main Vac valve closed
10/20/2011	7:25:21 PM	Bubbler valve closed
10/20/2011	7:25:21 PM	Bypass valve opened
10/20/2011	7:25:21 PM	Helium MFC set to  0.000000
10/20/2011	7:25:21 PM	H2 MFC set to  0.000000
10/20/2011	7:25:21 PM	BCl3 MFC set to  0.000000
10/20/2011	7:25:21 PM	PHl3 MFC set to  0.000000
10/20/2011	7:25:21 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:25:21 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:25:21 PM	Tube furnace set to 0
10/20/2011	7:25:51 PM	Helium valve closed
10/20/2011	7:25:51 PM	H2 valve closed
10/20/2011	7:25:51 PM	BCl3 valve closed
10/20/2011	7:25:51 PM	PH3 valve closed
10/20/2011	7:25:51 PM	SiCl4 pre valve closed
10/20/2011	7:25:51 PM	SiCl4 post valve closed
10/20/2011	7:25:51 PM	Bypass valve closed
10/20/2011	7:25:51 PM	Bubbler valve closed
10/20/2011	7:25:51 PM	Main Vac valve opened
10/20/2011	7:25:51 PM	Helium MFC set to  0.000000
10/20/2011	7:25:51 PM	H2 MFC set to  0.000000
10/20/2011	7:25:51 PM	BCl3 MFC set to  0.000000
10/20/2011	7:25:51 PM	PHl3 MFC set to  0.000000
10/20/2011	7:25:51 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:25:51 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:25:51 PM	Tube furnace set to 0
10/20/2011	7:26:21 PM	H2 valve closed
10/20/2011	7:26:21 PM	BCl3 valve closed
10/20/2011	7:26:21 PM	PH3 valve closed
10/20/2011	7:26:21 PM	SiCl4 pre valve closed
10/20/2011	7:26:21 PM	SiCl4 post valve closed
10/20/2011	7:26:21 PM	Bypass valve closed
10/20/2011	7:26:21 PM	Bubbler valve closed
10/20/2011	7:26:21 PM	Helium valve opened
10/20/2011	7:26:21 PM	Main Vac valve opened
10/20/2011	7:26:21 PM	Helium MFC set to  20.000000
10/20/2011	7:26:21 PM	H2 MFC set to  0.000000
10/20/2011	7:26:21 PM	BCl3 MFC set to  0.000000
10/20/2011	7:26:21 PM	PHl3 MFC set to  0.000000
10/20/2011	7:26:21 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:26:21 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:26:21 PM	Tube furnace set to 0
10/20/2011	7:26:51 PM	Helium valve closed
10/20/2011	7:26:51 PM	H2 valve closed
10/20/2011	7:26:51 PM	BCl3 valve closed
10/20/2011	7:26:51 PM	PH3 valve closed
10/20/2011	7:26:51 PM	SiCl4 pre valve closed
10/20/2011	7:26:51 PM	SiCl4 post valve closed
10/20/2011	7:26:51 PM	Bypass valve closed
10/20/2011	7:26:51 PM	Bubbler valve closed
10/20/2011	7:26:51 PM	Main Vac valve opened
10/20/2011	7:26:51 PM	Helium MFC set to  0.000000
10/20/2011	7:26:51 PM	H2 MFC set to  0.000000
10/20/2011	7:26:51 PM	BCl3 MFC set to  0.000000
10/20/2011	7:26:51 PM	PHl3 MFC set to  0.000000
10/20/2011	7:26:51 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:26:51 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:26:51 PM	Tube furnace set to 0
10/20/2011	7:27:21 PM	H2 valve closed
10/20/2011	7:27:21 PM	BCl3 valve closed
10/20/2011	7:27:21 PM	PH3 valve closed
10/20/2011	7:27:21 PM	SiCl4 pre valve closed
10/20/2011	7:27:21 PM	SiCl4 post valve closed
10/20/2011	7:27:21 PM	Bypass valve closed
10/20/2011	7:27:21 PM	Bubbler valve closed
10/20/2011	7:27:21 PM	Helium valve opened
10/20/2011	7:27:21 PM	Main Vac valve opened
10/20/2011	7:27:21 PM	Helium MFC set to  20.000000
10/20/2011	7:27:21 PM	H2 MFC set to  0.000000
10/20/2011	7:27:21 PM	BCl3 MFC set to  0.000000
10/20/2011	7:27:21 PM	PHl3 MFC set to  0.000000
10/20/2011	7:27:21 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:27:21 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:27:22 PM	Tube furnace set to 0
10/20/2011	7:27:52 PM	Helium valve closed
10/20/2011	7:27:52 PM	H2 valve closed
10/20/2011	7:27:52 PM	BCl3 valve closed
10/20/2011	7:27:52 PM	PH3 valve closed
10/20/2011	7:27:52 PM	SiCl4 pre valve closed
10/20/2011	7:27:52 PM	SiCl4 post valve closed
10/20/2011	7:27:52 PM	Bypass valve closed
10/20/2011	7:27:52 PM	Bubbler valve closed
10/20/2011	7:27:52 PM	Main Vac valve opened
10/20/2011	7:27:52 PM	Helium MFC set to  0.000000
10/20/2011	7:27:52 PM	H2 MFC set to  0.000000
10/20/2011	7:27:52 PM	BCl3 MFC set to  0.000000
10/20/2011	7:27:52 PM	PHl3 MFC set to  0.000000
10/20/2011	7:27:52 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:27:52 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:27:52 PM	Tube furnace set to 0
10/20/2011	7:28:22 PM	H2 valve closed
10/20/2011	7:28:22 PM	BCl3 valve closed
10/20/2011	7:28:22 PM	PH3 valve closed
10/20/2011	7:28:22 PM	SiCl4 pre valve closed
10/20/2011	7:28:22 PM	SiCl4 post valve closed
10/20/2011	7:28:22 PM	Bypass valve closed
10/20/2011	7:28:22 PM	Bubbler valve closed
10/20/2011	7:28:22 PM	Helium valve opened
10/20/2011	7:28:22 PM	Main Vac valve opened
10/20/2011	7:28:22 PM	Helium MFC set to  20.000000
10/20/2011	7:28:22 PM	H2 MFC set to  0.000000
10/20/2011	7:28:22 PM	BCl3 MFC set to  0.000000
10/20/2011	7:28:22 PM	PHl3 MFC set to  0.000000
10/20/2011	7:28:22 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:28:22 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:28:22 PM	Tube furnace set to 0
10/20/2011	7:28:52 PM	Helium valve closed
10/20/2011	7:28:52 PM	H2 valve closed
10/20/2011	7:28:52 PM	BCl3 valve closed
10/20/2011	7:28:52 PM	PH3 valve closed
10/20/2011	7:28:52 PM	SiCl4 pre valve closed
10/20/2011	7:28:52 PM	SiCl4 post valve closed
10/20/2011	7:28:52 PM	Bypass valve closed
10/20/2011	7:28:52 PM	Bubbler valve closed
10/20/2011	7:28:52 PM	Main Vac valve opened
10/20/2011	7:28:52 PM	Helium MFC set to  0.000000
10/20/2011	7:28:52 PM	H2 MFC set to  0.000000
10/20/2011	7:28:52 PM	BCl3 MFC set to  0.000000
10/20/2011	7:28:52 PM	PHl3 MFC set to  0.000000
10/20/2011	7:28:52 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:28:52 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:28:52 PM	Tube furnace set to 0
10/20/2011	7:29:22 PM	H2 valve closed
10/20/2011	7:29:22 PM	BCl3 valve closed
10/20/2011	7:29:22 PM	PH3 valve closed
10/20/2011	7:29:22 PM	SiCl4 pre valve closed
10/20/2011	7:29:22 PM	SiCl4 post valve closed
10/20/2011	7:29:22 PM	Bypass valve closed
10/20/2011	7:29:22 PM	Bubbler valve closed
10/20/2011	7:29:22 PM	Helium valve opened
10/20/2011	7:29:22 PM	Main Vac valve opened
10/20/2011	7:29:22 PM	Helium MFC set to  20.000000
10/20/2011	7:29:22 PM	H2 MFC set to  0.000000
10/20/2011	7:29:22 PM	BCl3 MFC set to  0.000000
10/20/2011	7:29:22 PM	PHl3 MFC set to  0.000000
10/20/2011	7:29:22 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:29:22 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:29:22 PM	Tube furnace set to 0
10/20/2011	7:29:52 PM	Helium valve closed
10/20/2011	7:29:52 PM	H2 valve closed
10/20/2011	7:29:52 PM	BCl3 valve closed
10/20/2011	7:29:52 PM	PH3 valve closed
10/20/2011	7:29:52 PM	SiCl4 pre valve closed
10/20/2011	7:29:52 PM	SiCl4 post valve closed
10/20/2011	7:29:52 PM	Bypass valve closed
10/20/2011	7:29:52 PM	Bubbler valve closed
10/20/2011	7:29:52 PM	Main Vac valve opened
10/20/2011	7:29:52 PM	Helium MFC set to  0.000000
10/20/2011	7:29:52 PM	H2 MFC set to  0.000000
10/20/2011	7:29:52 PM	BCl3 MFC set to  0.000000
10/20/2011	7:29:52 PM	PHl3 MFC set to  0.000000
10/20/2011	7:29:52 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:29:52 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:29:53 PM	Tube furnace set to 0
10/20/2011	7:30:23 PM	H2 valve closed
10/20/2011	7:30:23 PM	BCl3 valve closed
10/20/2011	7:30:23 PM	PH3 valve closed
10/20/2011	7:30:23 PM	SiCl4 pre valve closed
10/20/2011	7:30:23 PM	SiCl4 post valve closed
10/20/2011	7:30:23 PM	Bypass valve closed
10/20/2011	7:30:23 PM	Bubbler valve closed
10/20/2011	7:30:23 PM	Helium valve opened
10/20/2011	7:30:23 PM	Main Vac valve opened
10/20/2011	7:30:23 PM	Helium MFC set to  20.000000
10/20/2011	7:30:23 PM	H2 MFC set to  0.000000
10/20/2011	7:30:23 PM	BCl3 MFC set to  0.000000
10/20/2011	7:30:23 PM	PHl3 MFC set to  0.000000
10/20/2011	7:30:23 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:30:23 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:30:23 PM	Tube furnace set to 0
10/20/2011	7:30:53 PM	Helium valve closed
10/20/2011	7:30:53 PM	H2 valve closed
10/20/2011	7:30:53 PM	BCl3 valve closed
10/20/2011	7:30:53 PM	PH3 valve closed
10/20/2011	7:30:53 PM	SiCl4 pre valve closed
10/20/2011	7:30:53 PM	SiCl4 post valve closed
10/20/2011	7:30:53 PM	Bypass valve closed
10/20/2011	7:30:53 PM	Bubbler valve closed
10/20/2011	7:30:53 PM	Main Vac valve opened
10/20/2011	7:30:53 PM	Helium MFC set to  0.000000
10/20/2011	7:30:53 PM	H2 MFC set to  0.000000
10/20/2011	7:30:53 PM	BCl3 MFC set to  0.000000
10/20/2011	7:30:53 PM	PHl3 MFC set to  0.000000
10/20/2011	7:30:53 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:30:53 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:30:53 PM	Tube furnace set to 0
10/20/2011	7:31:23 PM	H2 valve closed
10/20/2011	7:31:23 PM	BCl3 valve closed
10/20/2011	7:31:23 PM	PH3 valve closed
10/20/2011	7:31:23 PM	SiCl4 pre valve closed
10/20/2011	7:31:23 PM	SiCl4 post valve closed
10/20/2011	7:31:23 PM	Bypass valve closed
10/20/2011	7:31:23 PM	Bubbler valve closed
10/20/2011	7:31:23 PM	Helium valve opened
10/20/2011	7:31:23 PM	Main Vac valve opened
10/20/2011	7:31:23 PM	Helium MFC set to  20.000000
10/20/2011	7:31:23 PM	H2 MFC set to  0.000000
10/20/2011	7:31:23 PM	BCl3 MFC set to  0.000000
10/20/2011	7:31:23 PM	PHl3 MFC set to  0.000000
10/20/2011	7:31:23 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:31:23 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:31:23 PM	Tube furnace set to 0
10/20/2011	7:31:53 PM	Helium valve closed
10/20/2011	7:31:53 PM	H2 valve closed
10/20/2011	7:31:53 PM	BCl3 valve closed
10/20/2011	7:31:53 PM	PH3 valve closed
10/20/2011	7:31:53 PM	SiCl4 pre valve closed
10/20/2011	7:31:53 PM	SiCl4 post valve closed
10/20/2011	7:31:53 PM	Bypass valve closed
10/20/2011	7:31:53 PM	Bubbler valve closed
10/20/2011	7:31:53 PM	Main Vac valve opened
10/20/2011	7:31:53 PM	Helium MFC set to  0.000000
10/20/2011	7:31:53 PM	H2 MFC set to  0.000000
10/20/2011	7:31:53 PM	BCl3 MFC set to  0.000000
10/20/2011	7:31:53 PM	PHl3 MFC set to  0.000000
10/20/2011	7:31:53 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:31:53 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:31:53 PM	Tube furnace set to 0
10/20/2011	7:32:23 PM	H2 valve closed
10/20/2011	7:32:23 PM	BCl3 valve closed
10/20/2011	7:32:23 PM	PH3 valve closed
10/20/2011	7:32:23 PM	SiCl4 pre valve closed
10/20/2011	7:32:23 PM	SiCl4 post valve closed
10/20/2011	7:32:23 PM	Bypass valve closed
10/20/2011	7:32:23 PM	Bubbler valve closed
10/20/2011	7:32:23 PM	Helium valve opened
10/20/2011	7:32:23 PM	Main Vac valve opened
10/20/2011	7:32:23 PM	Helium MFC set to  20.000000
10/20/2011	7:32:23 PM	H2 MFC set to  0.000000
10/20/2011	7:32:23 PM	BCl3 MFC set to  0.000000
10/20/2011	7:32:23 PM	PHl3 MFC set to  0.000000
10/20/2011	7:32:23 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:32:23 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:32:24 PM	Tube furnace set to 0
10/20/2011	7:32:54 PM	Helium valve closed
10/20/2011	7:32:54 PM	H2 valve closed
10/20/2011	7:32:54 PM	BCl3 valve closed
10/20/2011	7:32:54 PM	PH3 valve closed
10/20/2011	7:32:54 PM	SiCl4 pre valve closed
10/20/2011	7:32:54 PM	SiCl4 post valve closed
10/20/2011	7:32:54 PM	Bypass valve closed
10/20/2011	7:32:54 PM	Bubbler valve closed
10/20/2011	7:32:54 PM	Main Vac valve opened
10/20/2011	7:32:54 PM	Helium MFC set to  0.000000
10/20/2011	7:32:54 PM	H2 MFC set to  0.000000
10/20/2011	7:32:54 PM	BCl3 MFC set to  0.000000
10/20/2011	7:32:54 PM	PHl3 MFC set to  0.000000
10/20/2011	7:32:54 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:32:54 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:32:54 PM	Tube furnace set to 0
10/20/2011	7:33:24 PM	H2 valve closed
10/20/2011	7:33:24 PM	BCl3 valve closed
10/20/2011	7:33:24 PM	PH3 valve closed
10/20/2011	7:33:24 PM	SiCl4 pre valve closed
10/20/2011	7:33:24 PM	SiCl4 post valve closed
10/20/2011	7:33:24 PM	Bypass valve closed
10/20/2011	7:33:24 PM	Bubbler valve closed
10/20/2011	7:33:24 PM	Helium valve opened
10/20/2011	7:33:24 PM	Main Vac valve opened
10/20/2011	7:33:24 PM	Helium MFC set to  20.000000
10/20/2011	7:33:24 PM	H2 MFC set to  0.000000
10/20/2011	7:33:24 PM	BCl3 MFC set to  0.000000
10/20/2011	7:33:24 PM	PHl3 MFC set to  0.000000
10/20/2011	7:33:24 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:33:24 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:33:24 PM	Tube furnace set to 0
10/20/2011	7:33:54 PM	Helium valve closed
10/20/2011	7:33:54 PM	H2 valve closed
10/20/2011	7:33:54 PM	BCl3 valve closed
10/20/2011	7:33:54 PM	PH3 valve closed
10/20/2011	7:33:54 PM	SiCl4 pre valve closed
10/20/2011	7:33:54 PM	SiCl4 post valve closed
10/20/2011	7:33:54 PM	Bypass valve closed
10/20/2011	7:33:54 PM	Bubbler valve closed
10/20/2011	7:33:54 PM	Main Vac valve opened
10/20/2011	7:33:54 PM	Helium MFC set to  0.000000
10/20/2011	7:33:54 PM	H2 MFC set to  0.000000
10/20/2011	7:33:54 PM	BCl3 MFC set to  0.000000
10/20/2011	7:33:54 PM	PHl3 MFC set to  0.000000
10/20/2011	7:33:54 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:33:54 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:33:54 PM	Tube furnace set to 0
10/20/2011	7:34:24 PM	H2 valve closed
10/20/2011	7:34:24 PM	BCl3 valve closed
10/20/2011	7:34:24 PM	PH3 valve closed
10/20/2011	7:34:24 PM	SiCl4 pre valve closed
10/20/2011	7:34:24 PM	SiCl4 post valve closed
10/20/2011	7:34:24 PM	Bypass valve closed
10/20/2011	7:34:24 PM	Bubbler valve closed
10/20/2011	7:34:24 PM	Helium valve opened
10/20/2011	7:34:24 PM	Main Vac valve opened
10/20/2011	7:34:24 PM	Helium MFC set to  20.000000
10/20/2011	7:34:24 PM	H2 MFC set to  0.000000
10/20/2011	7:34:24 PM	BCl3 MFC set to  0.000000
10/20/2011	7:34:24 PM	PHl3 MFC set to  0.000000
10/20/2011	7:34:24 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:34:24 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:34:24 PM	Tube furnace set to 0
10/20/2011	7:34:54 PM	Helium valve closed
10/20/2011	7:34:54 PM	H2 valve closed
10/20/2011	7:34:54 PM	BCl3 valve closed
10/20/2011	7:34:54 PM	PH3 valve closed
10/20/2011	7:34:54 PM	SiCl4 pre valve closed
10/20/2011	7:34:54 PM	SiCl4 post valve closed
10/20/2011	7:34:54 PM	Bypass valve closed
10/20/2011	7:34:54 PM	Bubbler valve closed
10/20/2011	7:34:54 PM	Main Vac valve opened
10/20/2011	7:34:54 PM	Helium MFC set to  0.000000
10/20/2011	7:34:54 PM	H2 MFC set to  0.000000
10/20/2011	7:34:54 PM	BCl3 MFC set to  0.000000
10/20/2011	7:34:54 PM	PHl3 MFC set to  0.000000
10/20/2011	7:34:54 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:34:54 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:34:55 PM	Tube furnace set to 0
10/20/2011	7:35:25 PM	H2 valve closed
10/20/2011	7:35:25 PM	BCl3 valve closed
10/20/2011	7:35:25 PM	PH3 valve closed
10/20/2011	7:35:25 PM	SiCl4 pre valve closed
10/20/2011	7:35:25 PM	SiCl4 post valve closed
10/20/2011	7:35:25 PM	Bypass valve closed
10/20/2011	7:35:25 PM	Bubbler valve closed
10/20/2011	7:35:25 PM	Helium valve opened
10/20/2011	7:35:25 PM	Main Vac valve opened
10/20/2011	7:35:25 PM	Helium MFC set to  20.000000
10/20/2011	7:35:25 PM	H2 MFC set to  0.000000
10/20/2011	7:35:25 PM	BCl3 MFC set to  0.000000
10/20/2011	7:35:25 PM	PHl3 MFC set to  0.000000
10/20/2011	7:35:25 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:35:25 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:35:25 PM	Tube furnace set to 0
10/20/2011	7:35:55 PM	Helium valve closed
10/20/2011	7:35:55 PM	H2 valve closed
10/20/2011	7:35:55 PM	BCl3 valve closed
10/20/2011	7:35:55 PM	PH3 valve closed
10/20/2011	7:35:55 PM	SiCl4 pre valve closed
10/20/2011	7:35:55 PM	SiCl4 post valve closed
10/20/2011	7:35:55 PM	Bypass valve closed
10/20/2011	7:35:55 PM	Bubbler valve closed
10/20/2011	7:35:55 PM	Main Vac valve opened
10/20/2011	7:35:55 PM	Helium MFC set to  0.000000
10/20/2011	7:35:55 PM	H2 MFC set to  0.000000
10/20/2011	7:35:55 PM	BCl3 MFC set to  0.000000
10/20/2011	7:35:55 PM	PHl3 MFC set to  0.000000
10/20/2011	7:35:55 PM	SiCl4 MFC set to  0.000000
10/20/2011	7:35:55 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	7:35:55 PM	Tube furnace set to 0
10/20/2011	7:35:56 PM	Run finished at 7:35 PM
10/20/2011	7:35:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/20/2011	9:57:26 PM	Recipe started at 9:57 PM
10/20/2011	9:57:26 PM	Helium valve closed
10/20/2011	9:57:26 PM	H2 valve closed
10/20/2011	9:57:26 PM	BCl3 valve closed
10/20/2011	9:57:26 PM	PH3 valve closed
10/20/2011	9:57:26 PM	SiCl4 pre valve closed
10/20/2011	9:57:26 PM	SiCl4 post valve closed
10/20/2011	9:57:26 PM	Main Vac valve closed
10/20/2011	9:57:26 PM	Bypass valve closed
10/20/2011	9:57:26 PM	Bubbler valve closed
10/20/2011	9:57:26 PM	Helium MFC set to  0.000000
10/20/2011	9:57:26 PM	H2 MFC set to  0.000000
10/20/2011	9:57:26 PM	BCl3 MFC set to  0.000000
10/20/2011	9:57:26 PM	PHl3 MFC set to  0.000000
10/20/2011	9:57:26 PM	SiCl4 MFC set to  0.000000
10/20/2011	9:57:26 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	9:57:26 PM	Tube furnace set to 0
10/20/2011	9:57:29 PM	Helium valve closed
10/20/2011	9:57:29 PM	BCl3 valve closed
10/20/2011	9:57:29 PM	PH3 valve closed
10/20/2011	9:57:29 PM	SiCl4 pre valve closed
10/20/2011	9:57:29 PM	SiCl4 post valve closed
10/20/2011	9:57:29 PM	Main Vac valve closed
10/20/2011	9:57:29 PM	Bypass valve closed
10/20/2011	9:57:29 PM	Bubbler valve closed
10/20/2011	9:57:29 PM	H2 valve opened
10/20/2011	9:57:29 PM	Helium MFC set to  0.000000
10/20/2011	9:57:29 PM	H2 MFC set to  500.000000
10/20/2011	9:57:29 PM	BCl3 MFC set to  0.000000
10/20/2011	9:57:29 PM	PHl3 MFC set to  0.000000
10/20/2011	9:57:29 PM	SiCl4 MFC set to  0.000000
10/20/2011	9:57:29 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	9:57:30 PM	Tube furnace set to 0
10/20/2011	9:58:37 PM	Helium valve closed
10/20/2011	9:58:37 PM	BCl3 valve closed
10/20/2011	9:58:37 PM	PH3 valve closed
10/20/2011	9:58:37 PM	SiCl4 pre valve closed
10/20/2011	9:58:37 PM	SiCl4 post valve closed
10/20/2011	9:58:37 PM	Main Vac valve closed
10/20/2011	9:58:37 PM	Bypass valve closed
10/20/2011	9:58:37 PM	H2 valve opened
10/20/2011	9:58:37 PM	Bubbler valve opened
10/20/2011	9:58:37 PM	Helium MFC set to  0.000000
10/20/2011	9:58:37 PM	H2 MFC set to  500.000000
10/20/2011	9:58:37 PM	BCl3 MFC set to  0.000000
10/20/2011	9:58:37 PM	PHl3 MFC set to  0.000000
10/20/2011	9:58:37 PM	SiCl4 MFC set to  0.000000
10/20/2011	9:58:37 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	9:58:37 PM	Tube furnace set to 0
10/20/2011	9:58:38 PM	Helium valve closed
10/20/2011	9:58:38 PM	BCl3 valve closed
10/20/2011	9:58:38 PM	PH3 valve closed
10/20/2011	9:58:38 PM	SiCl4 pre valve closed
10/20/2011	9:58:38 PM	SiCl4 post valve closed
10/20/2011	9:58:38 PM	Main Vac valve closed
10/20/2011	9:58:38 PM	Bypass valve closed
10/20/2011	9:58:38 PM	H2 valve opened
10/20/2011	9:58:38 PM	Bubbler valve opened
10/20/2011	9:58:38 PM	Helium MFC set to  0.000000
10/20/2011	9:58:38 PM	H2 MFC set to  500.000000
10/20/2011	9:58:38 PM	BCl3 MFC set to  0.000000
10/20/2011	9:58:38 PM	PHl3 MFC set to  0.000000
10/20/2011	9:58:38 PM	SiCl4 MFC set to  0.000000
10/20/2011	9:58:38 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	9:58:38 PM	Tube furnace set to 1010
10/20/2011	10:18:38 PM	Helium valve closed
10/20/2011	10:18:38 PM	BCl3 valve closed
10/20/2011	10:18:38 PM	PH3 valve closed
10/20/2011	10:18:38 PM	Main Vac valve closed
10/20/2011	10:18:38 PM	Bypass valve closed
10/20/2011	10:18:38 PM	H2 valve opened
10/20/2011	10:18:38 PM	SiCl4 pre valve opened
10/20/2011	10:18:38 PM	SiCl4 post valve opened
10/20/2011	10:18:38 PM	Bubbler valve opened
10/20/2011	10:18:38 PM	Helium MFC set to  0.000000
10/20/2011	10:18:38 PM	H2 MFC set to  500.000000
10/20/2011	10:18:38 PM	BCl3 MFC set to  0.000000
10/20/2011	10:18:38 PM	PHl3 MFC set to  0.000000
10/20/2011	10:18:38 PM	SiCl4 MFC set to  40.000000
10/20/2011	10:18:38 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:18:38 PM	Tube furnace set to 1010
10/20/2011	10:28:38 PM	H2 valve closed
10/20/2011	10:28:38 PM	BCl3 valve closed
10/20/2011	10:28:38 PM	PH3 valve closed
10/20/2011	10:28:38 PM	SiCl4 pre valve closed
10/20/2011	10:28:38 PM	SiCl4 post valve closed
10/20/2011	10:28:38 PM	Main Vac valve closed
10/20/2011	10:28:38 PM	Bypass valve closed
10/20/2011	10:28:38 PM	Helium valve opened
10/20/2011	10:28:38 PM	Bubbler valve opened
10/20/2011	10:28:38 PM	Helium MFC set to  500.000000
10/20/2011	10:28:38 PM	H2 MFC set to  0.000000
10/20/2011	10:28:38 PM	BCl3 MFC set to  0.000000
10/20/2011	10:28:38 PM	PHl3 MFC set to  0.000000
10/20/2011	10:28:38 PM	SiCl4 MFC set to  0.000000
10/20/2011	10:28:38 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	10:28:38 PM	Tube furnace set to 0
10/20/2011	10:58:57 PM	Helium valve closed
10/20/2011	10:58:57 PM	H2 valve closed
10/20/2011	10:58:57 PM	BCl3 valve closed
10/20/2011	10:58:57 PM	PH3 valve closed
10/20/2011	10:58:57 PM	SiCl4 pre valve closed
10/20/2011	10:58:57 PM	SiCl4 post valve closed
10/20/2011	10:58:57 PM	Main Vac valve closed
10/20/2011	10:58:57 PM	Bubbler valve closed
10/20/2011	10:58:57 PM	Bypass valve closed
10/20/2011	10:58:57 PM	Helium MFC set to  0.000000
10/20/2011	10:58:57 PM	H2 MFC set to  0.000000
10/20/2011	10:58:57 PM	BCl3 MFC set to  0.000000
10/20/2011	10:58:57 PM	PHl3 MFC set to  0.000000
10/20/2011	10:58:57 PM	SiCl4 MFC set to  0.000000
10/20/2011	10:58:57 PM	Bypass solenoid MFC set to  760.000000
10/20/2011	10:58:57 PM	Tube furnace set to 0
10/20/2011	10:58:57 PM	Baratron reads 742.339149 Torr and NaOH valve is open.  Emergency exit.
10/20/2011	11:31:16 PM	Run aborted at 11:31 PM
10/20/2011	11:31:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2011	11:31:37 PM	Recipe started at 11:31 PM
10/20/2011	11:31:37 PM	Helium valve closed
10/20/2011	11:31:37 PM	H2 valve closed
10/20/2011	11:31:37 PM	BCl3 valve closed
10/20/2011	11:31:37 PM	PH3 valve closed
10/20/2011	11:31:37 PM	SiCl4 pre valve closed
10/20/2011	11:31:37 PM	SiCl4 post valve closed
10/20/2011	11:31:37 PM	Main Vac valve closed
10/20/2011	11:31:37 PM	Bubbler valve closed
10/20/2011	11:31:37 PM	Bypass valve opened
10/20/2011	11:31:37 PM	Helium MFC set to  0.000000
10/20/2011	11:31:37 PM	H2 MFC set to  0.000000
10/20/2011	11:31:37 PM	BCl3 MFC set to  0.000000
10/20/2011	11:31:37 PM	PHl3 MFC set to  0.000000
10/20/2011	11:31:37 PM	SiCl4 MFC set to  0.000000
10/20/2011	11:31:37 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:31:37 PM	Tube furnace set to 0
10/20/2011	11:32:54 PM	Helium valve closed
10/20/2011	11:32:54 PM	H2 valve closed
10/20/2011	11:32:54 PM	BCl3 valve closed
10/20/2011	11:32:54 PM	PH3 valve closed
10/20/2011	11:32:54 PM	SiCl4 pre valve closed
10/20/2011	11:32:54 PM	SiCl4 post valve closed
10/20/2011	11:32:54 PM	Main Vac valve closed
10/20/2011	11:32:54 PM	Bubbler valve closed
10/20/2011	11:32:54 PM	Bypass valve opened
10/20/2011	11:32:54 PM	Helium MFC set to  0.000000
10/20/2011	11:32:54 PM	H2 MFC set to  0.000000
10/20/2011	11:32:54 PM	BCl3 MFC set to  0.000000
10/20/2011	11:32:54 PM	PHl3 MFC set to  0.000000
10/20/2011	11:32:54 PM	SiCl4 MFC set to  0.000000
10/20/2011	11:32:54 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:32:54 PM	Tube furnace set to 0
10/20/2011	11:33:54 PM	Helium valve closed
10/20/2011	11:33:54 PM	H2 valve closed
10/20/2011	11:33:54 PM	BCl3 valve closed
10/20/2011	11:33:54 PM	PH3 valve closed
10/20/2011	11:33:54 PM	SiCl4 pre valve closed
10/20/2011	11:33:54 PM	SiCl4 post valve closed
10/20/2011	11:33:54 PM	Bypass valve closed
10/20/2011	11:33:54 PM	Bubbler valve closed
10/20/2011	11:33:54 PM	Main Vac valve opened
10/20/2011	11:33:54 PM	Helium MFC set to  0.000000
10/20/2011	11:33:54 PM	H2 MFC set to  0.000000
10/20/2011	11:33:54 PM	BCl3 MFC set to  0.000000
10/20/2011	11:33:55 PM	PHl3 MFC set to  0.000000
10/20/2011	11:33:55 PM	SiCl4 MFC set to  0.000000
10/20/2011	11:33:55 PM	Bypass solenoid MFC set to  0.000000
10/20/2011	11:33:55 PM	Tube furnace set to 0
10/20/2011	11:33:56 PM	Run finished at 11:33 PM
10/20/2011	11:33:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
